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Electron-beam (e-beam) lithography is commonly used in fabricating metal-oxide-silicon (MOS) quantum devices but creates defects at the Si/SiO$_2$ interface. Here we show that a forming gas anneal is effective at removing shallow defects…

材料科学 · 物理学 2017-03-23 Jin-Sung Kim , Alexei M. Tyryshkin , Stephen A. Lyon

A number of electronic devices involve metal/oxide interfaces in their structure where the oxide layer plays the role of electrical insulator. As the downscaling of devices continues, the oxide thickness can spread over only a few atomic…

材料科学 · 物理学 2017-04-26 Eric Tea , Jianqiu Huang , Guanchen Li , Celine Hin

The stability and formation mechanism of the defects relevant to silicon and carbon vacancies at the 4H-SiC(000$\bar{1}$)/SiO$_2$ interface after wet oxidation are investigated by first-principles calculation based on the density functional…

材料科学 · 物理学 2024-01-09 Mukai Tsunasaki , Tomoya Ono , Mitsuharu Uemoto

Variety of conducting heterointerfaces have been made between SrTiO3 substrates and thin capping layers of distinctly different oxide materials that can be classified into polar band insulators (e.g. LaAlO3), polar Mott insulators (e.g.…

材料科学 · 物理学 2018-06-26 Meng Zhang , Zheng Chen , Baohua Mao , Qingtian Li , Hai Bo , Tianshuang Ren , Pimo He , Zhi Liu , Yanwu Xie

The relationship between the presence of defects at the stacking structure of the Si/SiO$_2$ interface and leakage current is theoretically studied by first-principles calculation. I found that the leakage current through the interface with…

材料科学 · 物理学 2015-05-13 Tomoya Ono

Recent reports on the spontaneous formation of H2O2(aq) at the air-water interface and the solid-water interface have been sensational. The speculated mechanism at the air-water interface is based on instantaneous ultrahigh electric fields…

软凝聚态物质 · 物理学 2023-11-21 Muzzamil Ahmad Eatoo , Himanshu Mishra

Using ab-initio calculations within the framework of Density Functional Theory (DFT), atomic structures and electronic properties of MoS2/HfO2 interface are investigated. The impact of interfacial oxygen concentration on the MoS2/HfO2…

材料科学 · 物理学 2014-02-10 Santosh KC , Roberto C. Longo , Robert M. Wallace , Kyeongjae Cho

Surface damage caused by ionizing radiation in SiO$_2$ passivated silicon particle detectors consists mainly of the accumulation of a positively charged layer along with trapped-oxide-charge and interface traps inside the oxide and close to…

Density functional theory calculations for the electronic structures of the 4H-SiC(0001)/SiO$_2$ interface with atomic-scale steps are carried out to investigate the effect of NO annealing. The characteristic behavior of the conduction band…

材料科学 · 物理学 2024-01-09 Mitsuharu Uemoto , Nahoto Funaki , Kazuma Yokota , Takuji Hosoi , Tomoya Ono

The two-dimensional electron gas (2DEG) found in KTaO3-based interfaces has garnered attention due to its remarkable electronic properties. In this study, we investigated the conducting system embedded at the Si3N4/Al//KTO(110)…

Layered black arsenic (b-As) has recently emerged as a new anisotropic two-dimensional (2D) semiconducting material with applications in electronic devices. Understanding factors affecting the ambient stability of this material remains…

We performed density-functional theory calculations using the generalized gradient approximation for the exhange-correlation functional to investigate the unusual catalytic behavior of Ru under elevated gas pressure conditions for the…

材料科学 · 物理学 2008-02-03 C. Stampfl , M. Scheffler

Aluminum oxide (Al2O3) has been grown by atomic layer deposition on n-type 4H-SiC with and without a thin silicon dioxide (SiO2) intermediate layer. By means of Capacitance Voltage and Thermal Dielectric Relaxation Current measurements, the…

材料科学 · 物理学 2007-05-23 Marc Avice , Ulrike Grossner , Ioana Pintilie , Bengt G. Svensson , Ola Nilsen , Helmer Fjellvag

We report a lithographic process for creating high-resolution (<10 nm) carbon templates on Si(100). A scanning electron microscope, operating under low vacuum (10E-6 mbar), produces a carbon-containing deposit ("contamination resist") on…

材料科学 · 物理学 2009-11-10 Olivier Guise , Joachim Ahner , John T. Yates , Jeremy Levy

The effects of the oxidation atmosphere and crystal faces on the interface-trap density was examined by using constant-capacitance deep-level transient spectroscopy to clarify the origin of them. By comparing the DLTS spectra of the…

To improve mobility of fabricated silicon metal-oxide-semiconductor (MOS) quantum devices, forming gas annealing is a common method used to mitigate the effects of disorder at the Si/SiO2 interface. However, the importance of activation…

介观与纳米尺度物理 · 物理学 2020-05-21 Ke Wang , Hai-Ou Li , Gang Luo , Xin Zhang , Fang-Ming Jing , Rui-Zi Hu , Yuan Zhou , He Liu , Gui-Lei Wang , Gang Cao , Ming Xiao , Hong-Wen Jiang , Guo-Ping Guo

We investigate the effect of SiC stacking on the 4H-SiC/SiO$_2$ interface, both in the presence and absence of O defects, which appear during thermal oxidation, via first principles calculations. It is known that 4H-SiC(0001) has two…

材料科学 · 物理学 2015-08-10 Christopher James Kirkham , Tomoya Ono

The structural, electronic, and adhesive properties of Cu/SiO$_2$ interfaces are investigated using first-principles density-functional theory within the local density approximation. Interfaces between fcc Cu and $\alpha$-cristobalite(001)…

材料科学 · 物理学 2016-08-31 Kazutaka Nagao , J. B. Neaton , N. W. Ashcroft

GISAXS has been used to study morphology change of $\alpha$-Fe$_2$O$_3$ nanocubes after annealing processes. A submonolayer of the nanocubes was deposited on a Si(100) substrate. While an annealing at 400 $^\circ$C in a vacuum does not…

应用物理 · 物理学 2020-09-21 Chang-Yong Kim

Photoreduction of CO$_2$ is an important alternative approach aimed to reduce the CO$_2$ atmospheric content which is responsible of the global warming. The development of an efficient photocatalyst can strongly improve the efficiency and…

材料科学 · 物理学 2025-04-29 Onofrio Tau , Giacomo Giorgi , Riccardo Rurali