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Coherent grazing-incidence small-angle X-ray scattering is used to investigate the average kinetics and the fluctuation dynamics during self-organized nanopatterning of silicon by Ar$^+$ bombardment at 65$^{\circ}$ polar angle. At early…

Investigating the relationship between structure and dynamical processes is a central goal in condensed matter physics. Perhaps the most noted relationship between the two is the phenomenon of de Gennes narrowing, in which relaxation times…

介观与纳米尺度物理 · 物理学 2021-01-18 Peco Myint , Karl F. Ludwig, , Lutz Wiegart , Yugang Zhang , Andrei Fluerasu , Xiaozhi Zhang , Randall L. Headrick

The off-normal ion irradiation of semiconductor materials is seen to induce nanopatterning effects. Different theories are proposed to explain the mechanisms that drive self-reorganization of amorphisable surfaces. One of the prominent…

材料科学 · 物理学 2022-11-24 A. Lopez-Cazalilla , F. Djurabekova , K. Nordlund

Two-level modeling for nanoscale pattern formation on silicon target by Ar$^+$ ion sputtering is presented. Phase diagram illustrating possible nanosize surface patterns is discussed. Scaling characteristics for the structure wavelength…

材料科学 · 物理学 2011-07-01 V. O. Kharchenko , D. O. Kharchenko

The morphology evolution of Si (100) surfaces under 1200 eV Ar+ ion bombardment at normal incidence with and without metal incorporation is presented. The formation of nanodot patterns is observed only when the stationary Fe concentration…

材料科学 · 物理学 2015-05-18 Jing Zhou , Stefan Facsko , Ming Lu , Wolfhard Moeller

The production of nanopatterns on the surfaces of targets irradiated by ion beams at low and intermediate energies has developed during the present decade to a salient degree of control over the main pattern features. However, there is…

Off-normal low energy ion beam sputtering of solid surfaces often leads to morphological instabilities resulting in the spontaneous formation of ripple structures in nanometer length scales. In the case of Si surfaces at ambient…

材料科学 · 物理学 2009-04-09 Safiul A. Mollick , D. Ghose

We have reported the dependence of projectile mass, chemical reactivity and effect of molecular beams on the ion induced nano structure formation, when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are…

材料科学 · 物理学 2015-06-03 S. Bhattacharjee , P. Karmakar , A. Chakrabarti

We report experiments on surface nanopatterning of Si targets which are irradiated with 2 keV Ar + ions impinging at near-glancing incidence, under concurrent co-deposition of Au impurities simultaneously extracted from a gold target by the…

介观与纳米尺度物理 · 物理学 2016-03-30 B. Moon , S. Yoo , J. -S. Kim , S. J. Kang , J. Muñoz-García , R. Cuerno

Self-organized pattern formation by the process of reverse epitaxial growth has been investigated on GaAs (001) surfaces during 1 keV Ar+ bombardment at target temperature of 450 degC for a wide range of incident angles. Highly ordered…

材料科学 · 物理学 2016-08-24 Debasree Chowdhury , Debabrata Ghose

In this paper evolution of silicon surface topography, under low energy ion bombardment, is investigated at higher oblique incident angles in the range of 63\degree-83\degree. Si(100) substrates were exposed to 500 eV argon ions. Different…

介观与纳米尺度物理 · 物理学 2015-06-04 Tanmoy Basu , Jyoti Ranjan Mohanty , T. Som

Recent experimental studies focusing on the morphological properties of surfaces eroded by ion-bombardment report the observation of self-affine fractal surfaces, while others provide evidence about the development of a periodic ripple…

统计力学 · 物理学 2008-02-03 A. -L. Barabasi , M. A. Makeev , C. S. Lee , R. Cuerno

Erosion by ion-beam sputtering (IBS) of amorphous targets at off-normal incidence frequently produces a (nanometric) rippled surface pattern, strongly resembling macroscopic ripples on aeolian sand dunes. Suitable generalization of…

统计力学 · 物理学 2009-11-11 Javier Muñoz-García , Mario Castro , Rodolfo Cuerno

Ion sputtering induced nanoscale pattern formation on Ge (001) surface by 500 eV Ar+ bombardment has been investigated for a wide range of ion incidence angles at temperature of 300 deg.C. A fourfold symmetric topography forms in the…

介观与纳米尺度物理 · 物理学 2019-10-11 Debasree Chowdhury , Debabrata Ghose

Topography evolution of Si(100) surface due to oblique incidence low energy ion beam sputtering (IBS) is investigated. Experiments were carried out at different elevated temperatures from 20$^{\circ}$C to 450$^{\circ}$C and at each…

材料科学 · 物理学 2016-04-08 Debasree Chowdhury , Biswarup Satpati , Debabrata Ghose

The ion-bombardment induced nanopatterning of Si(001) has been simulated by atomistic simulations with and without Fe impurity. The surface contamination has been simulated by using a new force field developed for FeSi. This is a fitted…

材料科学 · 物理学 2014-01-09 P. Süle

Ion beam irradiation of semiconductors is a method to produce regular periodic nanoscale patterns self-organized on wafer scale. At low temperatures, the surface of semiconductors is typically amorphized by the ion beam. Above a material…

介观与纳米尺度物理 · 物理学 2016-11-22 Martin Engler , Tomáš Škereň , Stefan Facsko

Topography of silicon surfaces irradiated by a 2 MeV Si$^+$ ion beam at normal incidence and ion fluences in the range $10^{15}-10^{16}$ ions/cm$^{2}$ has been investigated using scanning tunneling microscopy. At length scales below…

材料科学 · 物理学 2009-11-07 D. K. Goswami , B. N. Dev

We modify the theory of nanoscale patterns produced by ion bombardment with concurrent impurity deposition to take into account the effect that the near-surface impurities have on the collision cascades. As the impurity concentration is…

材料科学 · 物理学 2016-05-04 R. Mark Bradley

We have reported the dependence of projectile mass along with the chemical reactivity and nonlinear effects on ion beam induced nano structure formation when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are…

介观与纳米尺度物理 · 物理学 2013-11-27 S. Bhattacharjee , P. Karmakar , A. K. Sinha , A. Chakrabarti
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