相关论文: Exploring the electron density in plasma induced b…

We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density…

The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to…

A new approach for an in-line beam monitor for ionizing radiation was introduced in a recent publication (Beckers, J., et al. "Mapping electron dynamics in highly transient EUV photon-induced plasmas: a novel diagnostic approach using…

Effects of radio-frequency power and driven frequency on the two-dimensional (axial and radial) distributions of electron density and temperature were experimentally investigated in low pressure capacitively coupled argon plasmas. The…

In the past years, EUV lithography scanner systems have entered High-Volume Manufacturing for state-of-the-art Integrated Circuits (IC), with critical dimensions down to 10 nm. This technology uses 13.5 nm EUV radiation, which is shaped and…

An experimental setup that directly reproduces Extreme UV-lithography relevant conditions for detailed component exposure tests is described. The EUV setup includes a pulsed plasma radiation source, operating at 13.5 nm; a debris mitigation…

We use Raman spectroscopy to show that exposing few-layer graphene to extreme ultraviolet (EUV, 13.5 nm) radiation, i.e. relatively low photon energy, results in an increasing density of defects. Furthermore, exposure to EUV radiation in a…

We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced plasma during and after the EUV pulse to obtain the energy…

The atmospheric-pressure hybrid plasma in the Ar:H2:CH4 mixture, maintained by microwave radiation (2.47 GHz) and CO2 laser radiation (10.6 {\mu}m) in the chamber of an experimental plasma-chemical reactor designed to study the synthesis of…

Laser-driven plasma wakefields can provide hundreds of MeV electron beam in mm-range distances potentially shrinking the dimension of the actual particle accelerators. The plasma density plays a fundamental role in the control and stability…

Spacecraft potential has often been used to infer electron density with much higher time resolution than is typically possible with plasma instruments. However, recently two studies by Torkar et al. 2017 and Graham et al. 2018 have shown…

In this work is examined a new modeling way of describing the continuous absorption of electromagnetic (EM) radiation in a dense partially ionized hydrogen plasmas with electron densities about $5\cdot10^{18}$ cm$^{-3}$ -…

A new modeling way of describing the continuous absorption of electromagnetic (EM) radiation in dense partially ionized hydrogen plasma is tested in this work. It is shown that the obtained results give a possibility of calculating spectral…

Interaction of ultera-short laser pulses with a dense cold plasma is investigated. Due to high density, of plasma, quantum effects such that Bohm potential and quantum pressure should be considered. The results reveal that electron density…

In the past years, EUV lithography scanner systems have entered High-Volume Manufacturing for state-of-the-art Integrated Circuits (IC), with critical dimensions down to 10 nm. This technology uses 13.5 nm EUV radiation, which is…

We report the first direct demonstration of possibility to generate the extreme ultraviolet (EUV) radiation with a freely expanding jet of dense plasma with multiply-charged ions supported by high-power microwaves. The detected emission…

A muon collider or Higgs factory requires significant reduction of the six dimensional emittance of the beam prior to acceleration. One method to accomplish this involves building a cooling channel using high pressure gas filled radio…

Hairpin probes measure electron density in plasmas where other techniques are unsuitable. Previous hairpins were constructed as a quarter-wave resonant structure typically made from a folded piece of wire. The present work conducts the…

In this paper the influence of large-scale decreasing and increasing gradients of the density of magnetized plasma on the relaxation process of a continuously injected relativistic electron beam with an energy of 611 keV ($v_b=0.9c$) and a…

We image equilibrium and non-equilibrium transport through a two-dimensional electronic cavity using scanning gate microscopy (SGM). Injecting electrons into the cavity through a quantum point contact close to equilibrium, we raster-scan a…