相关论文: Silicon nitride membrane resonators at millikelvin…
We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…
We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned…
We study the mechanical quality factors of bilayer aluminum/silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q's of tensioned resonator modes…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…
Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…
We study the optomechanical properties of stoichiometric SiN resonators through a combination of spectroscopic and interferometric imaging techniques. At room temperature, we demonstrate ultrahigh quality factors of $5 \times 10^7$ and a $f…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…
We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…
We demonstrate that soft-clamped silicon nitride strings with large aspect ratio can be operated at \si{\milli\kelvin} temperatures. The quality factors ($Q$) of two measured devices show consistent dependency on the cryostat temperature,…
Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies.…
Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of…
The thermo-mechanical properties of silicon make it of significant interest as a possible material for mirror substrates and suspension elements for future long-baseline gravitational wave detectors. The mechanical dissipation in 92um thick…
Most existing implementations of silicon nitride photonic crystal cavities rely on suspended membranes due to the low refractive index of silicon nitride. Such floating membranes are not mechanically robust, making them suboptimal for…
Generating non-classical states of light by opto-mechanical coupling depends critically on the mechanical and optical properties of micro-oscillators and on the minimization of thermal noise. We present an oscillating micro-mirror with a…
We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in-plane vibrational modes yields a displacement sensitivity of…
We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN…