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Focused electron beam induced deposition (FEBID) is a direct-write method for the fabrication of nanostructures whose lateral resolution rivals that of advanced electron lithography but is in addition capable of creating complex…

介观与纳米尺度物理 · 物理学 2020-02-24 Michael Huth , Fabrizio Porrati , Oleksandr V. Dobrovolskiy

The fabrication of three-dimensional (3D) nanostructures is of great interest to many areas of nanotechnology currently challenged by fundamental limitations of conventional lithography. One of the most promising direct-write methods for 3D…

介观与纳米尺度物理 · 物理学 2020-01-07 L. Skoric , D. Sanz-Hernández , F. Meng , C. Donnelly , S. Merino-Aceituno , A. Fernández-Pacheco

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

材料科学 · 物理学 2025-10-07 Frances Isabel Allen

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

介观与纳米尺度物理 · 物理学 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida

In the majority of cases nanostructures prepared by focused electron beam induced deposition (FEBID) employing an organometallic precursor contain predominantly carbon-based ligand dissociation products. This is unfortunate with regard to…

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

Focused electron beam induced deposition (FEBID) is a direct write technique for depositing materials on a support substrate akin to 3D printing with an electron beam (e-beam). Opportunities exist for merging this existing technique with…

材料科学 · 物理学 2023-07-13 Ondrej Dyck , Andrew R. Lupini , Philip D. Rack , Jason Fowlkes , Stephen Jesse

This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical…

材料科学 · 物理学 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

This study introduces a novel method for the deterministic fabrication of metallic nanostructures with controlled geometry and composition on suspended, single mode tapered optical nanofibers (TNFs) using a tailored Blurred Electron Beam…

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With…

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

介观与纳米尺度物理 · 物理学 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

The shift from two- to three-dimensional structures is not only a prominent trend in nanomagnetism but also reflects a broader movement across nanotechnology as a whole. Fields such as nanoelectronics, nanophotonics, data storage are poised…

介观与纳米尺度物理 · 物理学 2025-08-13 Sameh Okasha , Trevor P. Almeida

Direct electron beam writing is a powerful tool for fabricating complex nanostructures in a single step. The electron beam locally cleaves the molecules of an adsorbed gaseous precursor to form a deposit, similar to 3D printing but without…

材料科学 · 物理学 2024-05-14 Katja Höflich , Krzysztof Mackosz , Chinmai S. Jureddy , Aleksei Tsarapkin , Ivo Utke

Three-dimensional (3D) nanomagnetism is a rapidly developing field within magnetic materials research, where exploiting the third dimension unlocks opportunities for innovative applications in areas such as sensing, data storage, and…

介观与纳米尺度物理 · 物理学 2025-06-18 Sabri Koraltan , Fabrizio Porrati , Robert Kraft , Sven Barth , Markus Weigand , Claas Abert , Dieter Suess , Michael Huth , Sebastian Wintz

The present paper intends to be a new study of a widely used precursor in nanostructure deposition and FEBID processes with a focus on its fragmentation at collisions with low-energy electrons. Newer developments in nanotechnology with…

材料科学 · 物理学 2022-09-28 Maria Pintea , Nigel Mason , Maria Tudorovskaya

Media with engineered magnetization are essential building blocks in superconductivity, magnetism and magnon spintronics. However, the established thin-film and lithographic techniques insufficiently suit the realization of planar…

Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga+), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter…

Irradiation-driven fragmentation and chemical transformations of organometallic molecules play a central role in nanofabrication techniques based on the use of focused charged-particle beams. In this paper, the electron irradiation-induced…

原子与分子团簇 · 物理学 2026-03-27 Soumyo Kheto , Alexey Verkhovtsev , Bobby Antony , Andrey V. Solov'yov
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