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The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small beam-sample interaction volume. In this work, the focused…

应用物理 · 物理学 2018-05-02 D. Emmrich , A. Beyer , A. Nadzeyka , S. Bauerdick , J. C. Meyer , J. Kotakoski , A. Gölzhäuser

Helium-ion-induced swelling and blistering of single-crystal tungsten is investigated using a Helium Ion Microscope for site-specific dose-controlled irradiation (at 25 keV) with analysis by Helium Ion Microscopy, Atomic Force Microscopy…

材料科学 · 物理学 2019-12-12 Frances I. Allen , Peter Hosemann , Mehdi Balooch

Focused ion beam milling allows manipulation of the shape and size of nanostructures to create geometries potentially useful for opto-electronics, thermoelectrics, and quantum computing. We focus on using the ion beam to control the…

材料科学 · 物理学 2017-10-20 Sarah Friedensen , Jerome T. Mlack , Marija Drndić

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

材料科学 · 物理学 2025-10-07 Frances Isabel Allen

Helium implantation in surfaces is of interest for plasma facing materials and other nuclear applications. Vanadium as both a representative bcc material and a material relevant for fusion applications is implanted using a Helium ion beam…

材料科学 · 物理学 2021-01-19 P. Hosemann , M. Sebastiani , M. Z. Mughal , X. Huang , A. Scott , M. Balooch

Nanomaterials often undergo unusual mechanical deformations compared to their bulk counterparts when irradiated with ion-beams. This study visualizes and investigates some of the unusual interactions that can occur in nanomaterials during…

材料科学 · 物理学 2018-02-15 Morteza Aramesh

Focused ion beam irradiation of metastable Fe$_{78}$Ni$_{22}$ thin films grown on Cu(100) substrates is used to create ferromagnetic, body-centered-cubic patterns embedded into paramagnetic, face-centered-cubic surrounding. The structural…

Helium Ion Microcopy (HIM) based on Gas Field Ion Sources (GFIS) represents a new ultra high resolution microscopy and nano-fabrication technique. It is an enabling technology that not only provides imagery of conducting as well as uncoated…

材料科学 · 物理学 2014-02-07 Gregor Hlawacek , Vasilisa Veligura , Raoul van Gastel , Bene Poelsema

Large-area nanopore drilling is a major bottleneck in state-of-the-art nanoporous 2D membrane fabrication protocols. In addition, high-quality structural and statistical descriptions of as-fabricated porous membranes are key to predicting…

Helium-ion beams (HIB) focused to sub-nanometer scales have emerged as powerful tools for high-resolution imaging as well as nano-scale lithography, ion milling or deposition. Quantifying irradiation effects is essential for reliable device…

介观与纳米尺度物理 · 物理学 2017-03-21 Adrian Gozar , Nicholas E. Litombe , Jennifer E. Hoffman , Ivan Bozovic

We report on the etching of graphene devices with a helium ion beam, including in situ electrical measurement during lithography. The etching process can be used to nanostructure and electrically isolate different regions in a graphene…

介观与纳米尺度物理 · 物理学 2009-10-08 M. C. Lemme , D. C. Bell , J. R. Williams , L. A. Stern , B. W. H. Baugher , P. Jarillo-Herrero , C. M. Marcus

We report nanoscale patterning of graphene using a helium ion microscope configured for lithography. Helium ion lithography is a direct-write lithography process, comparable to conventional focused ion beam patterning, with no resist or…

介观与纳米尺度物理 · 物理学 2015-05-13 D. C. Bell , M. C. Lemme , L. A. Stern , J. R. Williams , C. M. Marcus

Focused-ion-beam milling is used to fabricate nanostencil masks suitable for the fabrication of magnetic nanostructures relevant for spin transfer torque studies. Nanostencil masks are used to define the device dimensions prior to the…

介观与纳米尺度物理 · 物理学 2021-03-25 B. Oezyilmaz , G. Richter , N. Muesgens , M. Fraune , M. Hawraneck , B. Beschoten , G. Guentherodt , M. Bueckins , J. Mayer

Focused ion beam (FIB) has been used as an effective tool for precise nanoscale fabrication. It has recently been employed to tailor defect engineering in functional nanomaterials such as two-dimensional transition metal dichalcogenides…

Superconducting devices are prone to reduced performance caused by impurities and defects along the edges of their wires, which can lead to local current crowding. In this study, we explored the use of helium ion irradiation to modify the…

The shape of metal nanoparticles embedded in dielectric matrices influences the optical properties of the composite material. Swift heavy ion irradiation can induce a controllable shape transformation in gold and other metals embedded in…

材料科学 · 物理学 2022-04-22 Aleksi A. Leino , Ville E. Jantunen , Flyura Djurabekova

Nanoscale fabrication and characterisation techniques critically underpin a vast range of fields, including materials science, nanoelectronics and nanobiotechnology. Focused ion beam (FIB) techniques are particularly appealing due to their…

Nanostructures have become an attractive subject due to many applications, particularly the photonic bandgap effect observed in photonic crystals. Nevertheless, the fabrication of such structures remains a challenge because of accurate…

光学 · 物理学 2008-01-29 F. Lacour , A. Sabac , M. Spajer

Optical microresonators have proven powerful in a wide range of applications, including cavity quantum electrodynamics, biosensing, microfludics, and cavity optomechanics. Their performance depends critically on the exact distribution of…

Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga+), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter…

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