相关论文: Wet Scandium Etching for hard mask formation on a …
High quality scanning transmission electron microscopy (STEM) data acquisition and analysis has become increasingly important due to the commercial demand for investigating the properties of complex materials such as battery cathodes;…
Metasurfaces have become a promising means for manipulating optical wavefronts in flat and high-performance optical devices. Conventional metasurface device design relies on trial-and-error methods to obtain target electromagnetic (EM)…
CMUT technology was invented and has been widely researched on silicon substrates. In recent years, fabrication of CMUT on glass substrates has raised significant interests because a number of advantages it can offer. First, parasitic…
Sapphire is an attractive material in photonic, optoelectronic, and transparent ceramic applications that stand to benefit from surface functionalization effects stemming from micro/nanostructures. Here we investigate the use of ultrafast…
Despite several decades of development, microfluidics lacks a sealing material that can be readily fabricated, leak-tight under high liquid water pressure, stable over a long time, and vacuum compatible. In this paper, we report the…
Ultrathin GaN nanowires (NWs) are attractive to maximize surface effects and as building block in high-frequency transistors. Here, we introduce a facile route for the top-down fabrication of ordered arrays of GaN NWs with aspect ratios…
Etched multilayers obtained by forming a laminar grating pattern within interferential multilayer mirrors are used in the soft x-ray range to improve the spectral resolution of wavelength dispersive spectrometers equipped with periodic…
Silicon (Si) is one of the most extensively studied materials owing to its significance to semiconductor science and technology. While efforts to find a new three-dimensional (3D) Si crystal with unusual properties have made some progress,…
Two-dimensional (2D) layered nanomaterials heterostructures, arising from the combination of 2D materials with other low-dimensional species, feature large surface area to volume ratio, which provides a high density of active sites for…
The development of advanced piezoelectric quartz MEMS for sensing and precise frequency control applications requires the nanostructuration and on chip integration on silicon of this material. However, the current quartz manufacturing…
In many natural multi-layered composites, such as in the dactyl club of Stomatopods or the shell of bivalve mollusks, the defining functional and structural properties are determined by locally varying orientations of inorganic building…
Electron diffraction through a thin patterned silicon membrane can be used to create complex spatial modulations in electron distributions by varying the intensity of different reflections using parameters such as crystallographic…
Gallium-based liquid metals have recently been found important in a variety of newly emerging applications such as room temperature metal 3D printing, direct writing of electronics and biomedicine etc. In all these practices, one frequently…
Integrated micro-nanochannel networks in fluidic devices are desirable in a number of applications ranging from self-healing/cooling materials to bioengineering. The conventional micro-manufacturing techniques are capable of either…
Graphene grown epitaxially on SiC has been proposed as a material for carbon-based electronics. Understanding the interface between graphene and the SiC substrate will be important for future applications. We report the ability to image the…
Two-dimensional (2D) nanochannels have emerged as a pivotal platform for exploring nanoscale hydrodynamics and electrokinetics. Conventional fabrication methods to make nanochannels often introduce polymer contamination and require lengthy…
The scanning electron microscope (SEM) delivers high resolution, high depth of focus and an image quality as if microscopic objects are seen by the naked eye. This makes it not only a powerful scientific instrument, but a tool inherently…
Efficient and scalable production of two-dimensional (2D) materials is required to overcome technological hurdles towards the creation of a 2D-materials-based industry. Here, we present a novel approach developed for the exfoliation of…
The Silicon Electron Multiplier (SiEM) sensor is a novel sensor concept that enables charge multiplication by high electric fields generated by embedded metal electrodes within the sensor bulk. Metal assisted chemical etching (MacEtch) in…
Thin films of functional inorganic materials, particularly oxides, play a vital role in optoelectronics, enabling applications that range from active optical components to MEMS-based architectures. Achieving high aspect ratio patterning of…