相关论文: The refined EUV mask model
Extreme Ultraviolet (EUV) photolithography is seen as the key enabler for increasing transistor density in the next decade. In EUV lithography, 13.5 nm EUV light is illuminated through a reticle, holding a pattern to be printed, onto a…
The extreme ultraviolet (EUV) spectra of distant star-forming regions cannot be probed directly using either ground- or space-based telescopes due to the high cross-section for interaction of EUV photons with the interstellar medium. This…
Ultraviolet (UV) electro-optic modulation system based on graphene-plasmonic metamaterials nanomechanical system (NEMS) with superlubricity is investigated. Due to the strong optical absorption intensity of graphene in the UV region and the…
Short-wavelength imaging, spectroscopy, and lithography scale down the characteristic length-scale to nano meters. This poses tight constraints on the optics finishing tolerances, which is often difficult to characterize. Indeed, even a…
Emittance exchange beamlines employ transverse masks to create drive and witness beams of variable longitudinal profile and bunch spacing. Recently, this approach has been used to create advanced driver profiles and demonstrate…
Inorganic molecular materials such as tin oxo cages are a promising generation of photoresists compatible with the demands of the recently developed Extreme UltraViolet (EUV) lithography technology. Therefore, a detailed understanding of…
The concept of metasurfaces was recently applied to the extreme ultraviolet (EUV) spectral regime, providing a new opportunity for transmissive focusing elements in a regime where materials are highly lossy. The realization of metalenses in…
High-quality point clouds have practical significance for point-based rendering, semantic understanding, and surface reconstruction. Upsampling sparse, noisy and nonuniform point clouds for a denser and more regular approximation of target…
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to…
Correct estimates of stellar extreme ultraviolet (EUV; 100 - 1170 \AA) flux are important for studying the photochemistry and stability of exoplanet atmospheres, as EUV radiation ionizes hydrogen and contributes to the heating, expansion,…
Extreme ultraviolet (XUV) transient absorption (TA) and transient reflectivity (TR) spectroscopies enable element-specific insights into attosecond-timescale processes in solids. XUV transient grating spectroscopy (TGS) is an emerging tool…
This paper presents a theoretical framework to analyze the performance of integrated unmanned aerial vehicle (UAV)-intelligent reflecting surface (IRS) relaying system in which IRS provides an additional degree of freedom combined with the…
The far-ultraviolet (FUV) flare activity of low-mass stars has become a focus in our understanding of the exoplanet atmospheres and how they evolve. However, direct detection of FUV flares and measurements of their energies and rates are…
We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, "SparkLight". Tin plasmas are…
Accurate knowledge of material reflectance in the vacuum ultraviolet (VUV) range is crucial for optimizing photon detection in noble gas detectors such as DUNE. Despite its importance, reflectance values for detector materials in the VUV…
The Soft X-ray intensity of loops in active region cores and corresponding footpoint, or moss, intensity observed in the EUV remain steady for several hours of observation. The steadiness of the emission has prompted many to suggest that…
We launch EVA, a vision-centric foundation model to explore the limits of visual representation at scale using only publicly accessible data. EVA is a vanilla ViT pre-trained to reconstruct the masked out image-text aligned vision features…
Quantifying the evolution of stellar extreme ultraviolet (EUV, 100 -- 1000 $\overset{\circ}{A}$) emission is critical for assessing the evolution of planetary atmospheres and the habitability of M dwarf systems. Previous studies from the…
Electrical impedance tomography (EIT) is a noninvasive medical imaging modality utilizing the current-density/voltage data measured on the surface of the subject. Calder\'on's method is a relatively recent EIT imaging algorithm that is…
Context: With the advancement of solar physics research, next-generation solar space missions and ground-based telescopes face significant challenges in efficiently transmitting and/or storing large-scale observational data. Aims: We…