相关论文: A new cantilever beam-rigid-body MEMS gyroscope: m…

The nonlinear dynamics of a microbeam-rigid body gyroscope are investigated by using a continuation method. To study the nonlinear dynamics of the system, the Lagrangian of the system is discretized and the reduced-order model is obtained.…

The eigenvalues of a new microbeam-rigid-body gyroscope are computed and studied to show the variation of frequencies versus the input spin rate. To this end, assuming the harmonic solution of the dynamic equation of motion the…

The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical…

Silicon-MEMS gyroscope is an important part of MEMS (Micro Electrical Mechanical System). There are some disturb ignored in traditional gyroscope that must be evaluated newly because of its smaller size (reach the level of micron). In these…

In this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based devices like accelerometers, switches and others. In this…

The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…

Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure…

The design, fabrication, and predicted performance of a new type of magnetic scanning probe microscope based on the newly discovered phenomenon of extraordinary magnetoresistance (EMR) is described. It is shown that the new probe should…

: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…

Mechanical stress control is becoming one of the major challenges for the future of micro and nanotechnologies. Micro scanning X-ray diffraction is one of the promising techniques that allows stress characterization in such complex…

A nonlinear dynamical system model that approximates a microscopic Gibbs field model for the yielding of a viscoplastic material subjected to varying external stress recently reported in [1] is presented. The predictions of the model are in…

This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…

Nonlinear dynamics of a two-side electro-statically actuated capacitive micro-beam is studied. The piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to…

A closed-loop control of a reaction-diffusion type process is introduced. The control system consist of a finite number of control and measurement devices. The measurement devices collect information about the current state of the process.…

A system consisting of a doubly clamped beam with an attached body (slider) free to move along the beam has been studied recently by multiple research groups. Under harmonic base excitation, the system has the capacity to passively adapt…

We demonstrate a novel optical microresonator gyroscope whose responsivity to rotation is enhanced by a factor of around $10^4$ by operating close to the critical point of a spontaneous symmetry breaking transition between…

A fundamental challenge in robot perception is the coupling of the sensor pose and robot pose. This has led to research in active vision where robot pose is changed to reorient the sensor to areas of interest for perception. Further,…

Frequency dependent dynamic behavior in Piezoresponse Force Microscopy (PFM) implemented on a beam-deflection atomic force microscope (AFM) is analyzed using a combination of modeling and experimental measurements. The PFM signal comprises…

An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…

MEMS technology has been developed rapidly in the last few years. More and more special micro structures were discussed in several publications. However, all of the structures were produced by consist of the three fundamental structures,…