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Coherent grazing-incidence small-angle X-ray scattering is used to investigate the average kinetics and the fluctuation dynamics during self-organized nanopatterning of silicon by Ar$^+$ bombardment at 65$^{\circ}$ polar angle. At early…

Off-normal low energy ion beam sputtering of solid surfaces often leads to morphological instabilities resulting in the spontaneous formation of ripple structures in nanometer length scales. In the case of Si surfaces at ambient…

材料科学 · 物理学 2009-04-09 Safiul A. Mollick , D. Ghose

Despite extensive study, fundamental understanding of self-organized patterning by broad-beam ion bombardment is still incomplete and controversial. Understanding the nanopatterning of elemental semiconductors, particularly silicon, is both…

We modify the theory of nanoscale patterns produced by ion bombardment with concurrent impurity deposition to take into account the effect that the near-surface impurities have on the collision cascades. As the impurity concentration is…

材料科学 · 物理学 2016-05-04 R. Mark Bradley

We show that the ion beam induced incompressible amorphous solid flow in terms of advection transport mechanism leads to the erosion and deposition of atoms at the amorphous/crystalline (a/c) interface resulting in the formation of pattern…

材料科学 · 物理学 2014-02-25 Tanuj Kumar , D. C. Agarwal , S. A. Khan , N. P. Lalla , D. Kanjilal

The morphology evolution of Si (100) surfaces under 1200 eV Ar+ ion bombardment at normal incidence with and without metal incorporation is presented. The formation of nanodot patterns is observed only when the stationary Fe concentration…

材料科学 · 物理学 2015-05-18 Jing Zhou , Stefan Facsko , Ming Lu , Wolfhard Moeller

Ion sputtering induced nanoscale pattern formation on Ge (001) surface by 500 eV Ar+ bombardment has been investigated for a wide range of ion incidence angles at temperature of 300 deg.C. A fourfold symmetric topography forms in the…

介观与纳米尺度物理 · 物理学 2019-10-11 Debasree Chowdhury , Debabrata Ghose

While numerous models exist which explain certain aspects of irradiation-induced nanopatterning on semiconductors, a comprehensive theoretical explanation has remained elusive. However, it is increasingly apparent that such a model will…

介观与纳米尺度物理 · 物理学 2026-05-21 Tyler P. Evans , Scott A. Norris

We report experiments on surface nanopatterning of Si targets which are irradiated with 2 keV Ar + ions impinging at near-glancing incidence, under concurrent co-deposition of Au impurities simultaneously extracted from a gold target by the…

介观与纳米尺度物理 · 物理学 2016-03-30 B. Moon , S. Yoo , J. -S. Kim , S. J. Kang , J. Muñoz-García , R. Cuerno

The production of nanopatterns on the surfaces of targets irradiated by ion beams at low and intermediate energies has developed during the present decade to a salient degree of control over the main pattern features. However, there is…

We report the decisive role of reactive ion impurities in low energy Ar+ ion beam on surface nanopattern formation. The source of experimental inconsistency in pattern formation by low energy (few keV to 10's of KeV) Ar+ ion beam has been…

材料科学 · 物理学 2018-09-05 Dipak Bhowmik , Manabendra Mukherjee , Prasanta Karmakar

We have reported the dependence of projectile mass, chemical reactivity and effect of molecular beams on the ion induced nano structure formation, when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are…

材料科学 · 物理学 2015-06-03 S. Bhattacharjee , P. Karmakar , A. Chakrabarti

The off-normal ion irradiation of semiconductor materials is seen to induce nanopatterning effects. Different theories are proposed to explain the mechanisms that drive self-reorganization of amorphisable surfaces. One of the prominent…

材料科学 · 物理学 2022-11-24 A. Lopez-Cazalilla , F. Djurabekova , K. Nordlund

We derive a stochastic nonlinear equation to describe the evolution and scaling properties of surfaces eroded by ion bombardment. The coefficients appearing in the equation can be calculated explicitly in terms of the physical parameters…

凝聚态物理 · 物理学 2009-10-22 Rodolfo Cuerno , Albert-Laszlo Barabasi

We derive a stochastic nonlinear continuum theory to describe the morphological evolution of amorphous surfaces eroded by ion bombardment. Starting from Sigmund's theory of sputter erosion, we calculate the coefficients appearing in the…

材料科学 · 物理学 2007-05-23 Maxim Makeev , Rodolfo Cuerno , Albert-László Barabási

In this paper evolution of silicon surface topography, under low energy ion bombardment, is investigated at higher oblique incident angles in the range of 63\degree-83\degree. Si(100) substrates were exposed to 500 eV argon ions. Different…

介观与纳米尺度物理 · 物理学 2015-06-04 Tanmoy Basu , Jyoti Ranjan Mohanty , T. Som

A study of ripple formation on sapphire surfaces by 300-2000 eV Ar+ ion bombardment is presented. Surface characterization by in-situ synchrotron grazing incidence small angle x-ray scattering and ex-situ atomic force microscopy is…

On the proper timescale, amorphous solids can flow. Solid flow can be observed macroscopically in glaciers or lead pipes, but it can also be artificially enhanced by creating defects. Ion Beam Sputtering (IBS) is a technique in which ions…

材料科学 · 物理学 2012-03-07 Mario Castro , Rodolfo Cuerno

Topography of silicon surfaces irradiated by a 2 MeV Si$^+$ ion beam at normal incidence and ion fluences in the range $10^{15}-10^{16}$ ions/cm$^{2}$ has been investigated using scanning tunneling microscopy. At length scales below…

材料科学 · 物理学 2009-11-07 D. K. Goswami , B. N. Dev

Numerical simulation of pattern formation on plane target surfaces undergoing ion-beam sputtering is carried out. Base of the mathematical model of target ion-sputtering is nonlinear evolutionary equation in which the erosion velocity…

适应与自组织系统 · 物理学 2014-09-25 Nikolay A. Kudryashov , Mikhail V. Skachkov
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