相关论文: Deposition of Diamond-like Carbon films using Dens…

Liquid gas was used to produce DLC films on Cu, Al and steel substrates by DC plasma technique. The absorption in IR reflectance indicates, grown films are DLC. By deconvolution of room temperature UV-visible spectra of the films grown at…

Diamond-like carbon (DLC) coatings have excellent mechanical and tribological properties, as well as good wear and corrosion resistance. They are well established in medical, metalworking and automotive applications. However, further…

In this master thesis, diamond-like carbon DLC/Cr bilayer systems, with thickness up to 1278 nm were formed on ABS, glass and Si substrates. Substrates surface were prepared by oxygen plasma cleaning process. The chromium thin film, which…

Diamond-like carbon (DLC) films are synthesized on Si using plasma enhanced chemical vapor deposition. The role of substrate bias and nitrogen doping on the structural evolution and local elastic modulus of DLC films are systematically…

The Hydrogenated Diamond Like Carbon (HDLC) thin films are deposited on Silicon substrate at room temperature using asymmetric capacitively coupled RF plasma with varying flow rates of methane. These films are undergone annealing at high…

Thin aluminum oxide films were deposited by a new and simple physicochemical method called chemical liquid phase deposition (CLD) on semiconductor materials. Aluminum sulfate with crystallized water and sodium bicarbonate were used as…

Diamond-Like Carbon (DLC) films have been shown to demonstrate various tribological behaviors: in ultra-high vacuum (UHV), with either friction coefficients as low as 0.01 or less and very mild wear, or very high friction coefficients…

We report a novel method for depositing patterned dielectric layers with sub-micron features using atomic layer deposition (ALD). The patterned films are superior to sputtered or evaporated films in continuity, smoothness, conformality, and…

A novel high-energy electron cyclotron resonance (ECR) ion beam deposition (IBD) technique was used to fabricate DLC films at different ion beam energies. The ratios of sp2/sp3 bonding in the DLC coatings were determined by Raman…

Characterization of diamond-like carbon (DLC) coatings at cryogenic temperatures (down to 77 K) is presented, covering the electrical resistivity range of practical interest to gaseous and liquid particle instrumentation: 10^-1-10^5…

We have developed capacitively-transduced nanomechanical resonators using sp$^2$-rich diamond-like carbon (DLC) thin films as conducting membranes. The electrically conducting DLC films were grown by physical vapor deposition at a…

Diamond and diamond-like carbon (DLC) coatings are widely employed for their exceptional mechanical, thermal and chemical properties, but their industrial application is often limited by weak adhesion to metallic substrates. In this work,…

Micron-thick boron films have been deposited by Pulsed Laser Deposition in vacuum on several substrates at room temperature. The use of high energy pulses (>700 mJ) results in the deposition of smooth coatings with low oxygen uptake even at…

Patterning of diamond-like carbon (DLC) and DLC:metal nanocomposites is of interest for an increasing number of applications. We demonstrate a nanoimprint lithography process based on silicon containing thermoplastic resist combined with…

We demonstrate an environmentally friendly and scalable method to create fluorine-doped diamond-like carbon (F-DLC) coatings using plasma immersion ion implantation plasma-enhanced chemical vapor deposition (PIII-PECVD) with…

During the growth of metal thin films on dielectric substrates at a given deposition temperature T, the film's morphology is conditioned by the magnitude and asymmetry of up- and downhill diffusion. Any severe change of this mechanism leads…

The correlations between properties of hydrogenated diamond like carbon films and their Raman spectra have been investigated. The films are prepared by plasma deposition technique, keeping different hydrogen to methane ratio during the…

The deposition of nano-crystalline ZnS/diamond composite protective coatings on silicon, sapphire, and ZnS substrates, as a preliminary step to coating infrared transparent ZnS substrates from powder mixtures by the aerosol deposition…

CdTe and CdS are emerging as the most promising materials for thin film photovoltaics in the quest of the achievement of grid parity. The major challenge for the advancement of grid parity is the achievement of high quality at the same time…

A hot filament chemical vapor deposition is an attractive technique to deposit carbon films of different applications. In this technique, it is also feasible to study the influence of chamber pressure in the deposition of carbon films. In…