聚合物基底上类金刚石碳涂层的力学与表面表征
摘要
在本硕士论文中，厚度达1278 nm的类金刚石碳DLC/Cr双层系统被沉积在ABS、玻璃和硅基底上。基底表面通过氧等离子清洗工艺进行制备。作为缓冲层的铬薄膜通过磁控溅射沉积生长。类金刚石碳采用脉冲直流PECVD沉积，以甲烷和氢气作为反应物。采用Plackett-Burman实验设计来确定沉积工艺的技术参数对所得涂层厚度、沉积速率、本征应力、接触角、粗糙度、摩擦系数和磨损率的影响。自变量为功率、腔室压力、沉积时间、气体总流量、反应气体组成和氧等离子清洗条件。报告的本征应力值在0.13-0.78 GPa之间。耐磨性测量是通过研磨具有确定几何形状的穹顶形来进行的。在1E-14至1E-15 m^3/Nm范围内实现了低磨损率。使用带有碳化钨球的纳米摩擦仪，在氮气环境中20%至80%的不同相对湿度下测量了所得涂层的摩擦。结果表明，摩擦系数随相对湿度的增加而增加。报告的摩擦系数值在0.12至0.24之间。DLC涂层的主要目的是改善ABS的耐磨性和摩擦学行为，以提高其在汽车、医疗、家居和纺织等领域的耐用性。
引用
@article{arxiv.1509.08512,
title = {Mechanical and Surface Characterization of Diamond-Like Carbon Coatings onto Polymeric Substrate},
author = {Joan Martí-González and Enric Bertran},
journal= {arXiv preprint arXiv:1509.08512},
year = {2015}
}
备注
11 pages, 15 figures, 6 tables. This work has been carried out by Joan Mart\'i-Gonz\'alez and supervised by Prof. Enric Bertran. A part of this work was submmitted as master thesis and qualified as excellent (9.8/10) by three materials science experts forming the Jury commission of the master of Nanoscience and Nanotechnology of the "Universitat de Barcelona"