在 65 nm CMOS 成像工艺中实现的模拟单片有源像素传感器测试结构的表征
仪器与探测器
2024-03-15 v1
摘要
采用 Tower Partners Semiconductor Co. 的 CMOS 65 nm ISC 工艺制造了模拟测试结构。其目的是表征和验证该工艺,并为下一代用于高能物理的单片有源像素传感器优化传感器设计。该技术通过在掺杂浓度、像素几何形状和像素间距(10-25 m)上存在差异的几种变体进行了探索。这些变体在最高达 3 MGy 和 1 MeV n cm 的不同辐照水平下进行了测试。本文报告了具有 44 像素矩阵直接模拟输出的原型结果,从而允许对电荷收集特性进行系统而详细的研究。测量分别使用 Fe X 射线源以及利用最小电离粒子的束流测试进行。结果不仅证明了将该技术用于粒子探测的可行性,也为未来的应用和优化提供了参考。
引用
@article{arxiv.2403.08952,
title = {Characterisation of analogue Monolithic Active Pixel Sensor test structures implemented in a 65 nm CMOS imaging process},
author = {Gianluca Aglieri Rinella and Giacomo Alocco and Matias Antonelli and Roberto Baccomi and Stefania Maria Beole and Mihail Bogdan Blidaru and Bent Benedikt Buttwill and Eric Buschmann and Paolo Camerini and Francesca Carnesecchi and Marielle Chartier and Yongjun Choi and Manuel Colocci and Giacomo Contin and Dominik Dannheim and Daniele De Gruttola and Manuel Del Rio Viera and Andrea Dubla and Antonello di Mauro and Maurice Calvin Donner and Gregor Hieronymus Eberwein and Jan Egger and Laura Fabbietti and Finn Feindt and Kunal Gautam and Roman Gernhaeuser and James Julian Glover and Laura Gonella and Karl Gran Grodaas and Ingrid-Maria Gregor and Hartmut Hillemanns and Lennart Huth and Armin Ilg and Artem Isakov and Daniel Matthew Jones and Antoine Junique and Jetnipit Kaewjai and Markus Keil and Jiyoung Kim and Alex Kluge and Chinorat Kobdaj and Artem Kotliarov and Kritsada Kittimanapun and Filip Křížek and Gabriela Kucharska and Svetlana Kushpil and Paola La Rocca and Natthawut Laojamnongwong and Lukas Lautner and Roy Crawford Lemmon and Corentin Lemoine and Long Li and Francesco Librizzi and Jian Liu and Anna Macchiolo and Magnus Mager and Davide Marras and Paolo Martinengo and Silvia Masciocchi and Serena Mattiazzo and Marius Wilm Menzel and Alice Mulliri and Mia Rose Mylne and Francesco Piro and Alexandre Rachevski and Marika Rasà and Karoliina Rebane and Felix Reidt and Riccardo Ricci and Sara Ruiz Daza and Gaspare Saccà and Isabella Sanna and Valerio Sarritzu and Judith Schlaadt and David Schledewitz and Gilda Scioli and Serhiy Senyukov and Adriana Simancas and Walter Snoeys and Simon Spannagel and Miljenko Šuljić and Alessandro Sturniolo and Nicolas Tiltmann and Antonio Trifirò and Gianluca Usai and Tomas Vanat and Jacob Bastiaan Van Beelen and Laszlo Varga and Michele Verdoglia and Gianpiero Vignola and Anna Villani and Haakan Wennloef and Jonathan Witte and Rebekka Bettina Wittwer},
journal= {arXiv preprint arXiv:2403.08952},
year = {2024}
}