Digital Pixel Test Structures implemented in a 65 nm CMOS process
Abstract
The ALICE ITS3 (Inner Tracking System 3) upgrade project and the CERN EP R&D on monolithic pixel sensors are investigating the feasibility of the Tower Partners Semiconductor Co. 65 nm process for use in the next generation of vertex detectors. The ITS3 aims to employ wafer-scale Monolithic Active Pixel Sensors thinned down to 20 to 40 um and bent to form truly cylindrical half barrels. Among the first critical steps towards the realisation of this detector is to validate the sensor technology through extensive characterisation both in the laboratory and with in-beam measurements. The Digital Pixel Test Structure (DPTS) is one of the prototypes produced in the first sensor submission in this technology and has undergone a systematic measurement campaign whose details are presented in this article. The results confirm the goals of detection efficiency and non-ionising and ionising radiation hardness up to the expected levels for ALICE ITS3 and also demonstrate operation at +20 C and a detection efficiency of 99% for a DPTS irradiated with a dose of 1 MeV ncm. Furthermore, spatial, timing and energy resolutions were measured at various settings and irradiation levels.
Cite
@article{arxiv.2212.08621,
title = {Digital Pixel Test Structures implemented in a 65 nm CMOS process},
author = {Gianluca Aglieri Rinella and Anton Andronic and Matias Antonelli and Mauro Aresti and Roberto Baccomi and Pascal Becht and Stefania Beole and Justus Braach and Matthew Daniel Buckland and Eric Buschmann and Paolo Camerini and Francesca Carnesecchi and Leonardo Cecconi and Edoardo Charbon and Giacomo Contin and Dominik Dannheim and Joao de Melo and Wenjing Deng and Antonello di Mauro and Jan Hasenbichler and Hartmut Hillemanns and Geun Hee Hong and Artem Isakov and Antoine Junique and Alex Kluge and Artem Kotliarov and Filip Křížek and Lukas Lautner and Magnus Mager and Davide Marras and Paolo Martinengo and Silvia Masciocchi and Marius Wilm Menzel and Magdalena Munker and Francesco Piro and Alexandre Rachevski and Karoliina Rebane and Felix Reidt and Roberto Russo and Isabella Sanna and Valerio Sarritzu and Serhiy Senyukov and Walter Snoeys and Jory Sonneveld and Miljenko Šuljić and Peter Svihra and Nicolas Tiltmann and Gianluca Usai and Jacob Bastiaan Van Beelen and Mirella Dimitrova Vassilev and Caterina Vernieri and Anna Villani},
journal= {arXiv preprint arXiv:2212.08621},
year = {2023}
}
Comments
v4: Corrected Table 1. v3: Implemented reviewers' comments. v2: Updated threshold calibration method. Implemented colorblind friendly color palette in all figures. Updated references