Characterisation of analogue Monolithic Active Pixel Sensor test structures implemented in a 65 nm CMOS imaging process
Abstract
Analogue test structures were fabricated using the Tower Partners Semiconductor Co. CMOS 65 nm ISC process. The purpose was to characterise and qualify this process and to optimise the sensor for the next generation of Monolithic Active Pixels Sensors for high-energy physics. The technology was explored in several variants which differed by: doping levels, pixel geometries and pixel pitches (10-25 m). These variants have been tested following exposure to varying levels of irradiation up to 3 MGy and 1 MeV n cm. Here the results from prototypes that feature direct analogue output of a 44 pixel matrix are reported, allowing the systematic and detailed study of charge collection properties. Measurements were taken both using Fe X-ray sources and in beam tests using minimum ionizing particles. The results not only demonstrate the feasibility of using this technology for particle detection but also serve as a reference for future applications and optimisations.
Keywords
Cite
@article{arxiv.2403.08952,
title = {Characterisation of analogue Monolithic Active Pixel Sensor test structures implemented in a 65 nm CMOS imaging process},
author = {Gianluca Aglieri Rinella and Giacomo Alocco and Matias Antonelli and Roberto Baccomi and Stefania Maria Beole and Mihail Bogdan Blidaru and Bent Benedikt Buttwill and Eric Buschmann and Paolo Camerini and Francesca Carnesecchi and Marielle Chartier and Yongjun Choi and Manuel Colocci and Giacomo Contin and Dominik Dannheim and Daniele De Gruttola and Manuel Del Rio Viera and Andrea Dubla and Antonello di Mauro and Maurice Calvin Donner and Gregor Hieronymus Eberwein and Jan Egger and Laura Fabbietti and Finn Feindt and Kunal Gautam and Roman Gernhaeuser and James Julian Glover and Laura Gonella and Karl Gran Grodaas and Ingrid-Maria Gregor and Hartmut Hillemanns and Lennart Huth and Armin Ilg and Artem Isakov and Daniel Matthew Jones and Antoine Junique and Jetnipit Kaewjai and Markus Keil and Jiyoung Kim and Alex Kluge and Chinorat Kobdaj and Artem Kotliarov and Kritsada Kittimanapun and Filip Křížek and Gabriela Kucharska and Svetlana Kushpil and Paola La Rocca and Natthawut Laojamnongwong and Lukas Lautner and Roy Crawford Lemmon and Corentin Lemoine and Long Li and Francesco Librizzi and Jian Liu and Anna Macchiolo and Magnus Mager and Davide Marras and Paolo Martinengo and Silvia Masciocchi and Serena Mattiazzo and Marius Wilm Menzel and Alice Mulliri and Mia Rose Mylne and Francesco Piro and Alexandre Rachevski and Marika Rasà and Karoliina Rebane and Felix Reidt and Riccardo Ricci and Sara Ruiz Daza and Gaspare Saccà and Isabella Sanna and Valerio Sarritzu and Judith Schlaadt and David Schledewitz and Gilda Scioli and Serhiy Senyukov and Adriana Simancas and Walter Snoeys and Simon Spannagel and Miljenko Šuljić and Alessandro Sturniolo and Nicolas Tiltmann and Antonio Trifirò and Gianluca Usai and Tomas Vanat and Jacob Bastiaan Van Beelen and Laszlo Varga and Michele Verdoglia and Gianpiero Vignola and Anna Villani and Haakan Wennloef and Jonathan Witte and Rebekka Bettina Wittwer},
journal= {arXiv preprint arXiv:2403.08952},
year = {2024}
}