负电容晶体管中的反常亚阈值行为
应用物理
2020-06-05 v1
摘要
近期对超薄体负电容场效应晶体管(Negative Capacitance Field Effect Transistor)的测量显示出经典 MOSFET 中未预期的亚阈值行为。具体而言,在多个栅长下至 30 nm 测量的器件中,发现亚阈值摆幅在亚阈值区内随栅偏压增大而减小。此外,相对于对照组器件亚阈值摆幅的改善表现出对栅长的非单调依赖。在本文中,我们使用经实测电容-电压校准的 Landau-Khanatnikov 铁电栅叠层模型,表明这两种反常行为均可通过 TCAD 仿真定量复现。
引用
@article{arxiv.2006.02594,
title = {Anomalous Subthreshold Behaviors in Negative Capacitance Transistors},
author = {Yu-Hung Liao and Daewoong Kwon and Suraj Cheema and Ava J. Tan and Ming-Yen Kao and Li-Chen Wang and Chenming Hu and Sayeef Salahuddin},
journal= {arXiv preprint arXiv:2006.02594},
year = {2020}
}
备注
Submitted to IEEE Electron Device Letter and is currently under review