Related papers: Fabrication of MEMS Resonators in Thin SOI
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate mechanical properties are important for successful…
Precise phase control of microwaves and millimeter waves is critical for today's wireless communication and signal processing electronics. For decades, achieving even modest phase-shifting resolution has demanded a complex mix of transistor…
Light trapping in planar ultrathin-film solar cells is limited due to a small number of optical modes available in the thin-film slab. A nanostructured thin-film design could surpass this limit by providing broadband increase in the local…
Next-generation wireless networks are expected to utilize the limited radio frequency (RF) resources more efficiently with the aid of intelligent transceivers. To this end, we propose a promising transceiver architecture relying on stacked…
Highly reproducible manufacturing of organic optical crystals with well-defined geometry and dimension is important to realize industrially relevant all-organic microelectronic and nanophotonic components, and photonic integrated circuits.…
An efficient modulation of backscattered energy is one of the key requirements for enabling efficient wireless communication channels. Typical architectures, being based on either electronically or mechanically modulated reflectors, cannot…
We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2…
Flash memory technology is widely common in modern microelectronics, and is essentially affecting our daily life. Considering the recent progress in photonic circuitry, and in particular silicon photonics circuitry, there is now an…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Integrated heaters are a basic ingredient within the photonics toolbox, in particular for microresonator frequency tuning through the thermo-refractive effect. Resonators that are fully embedded in a solid cladding (typically…
A miniaturized full-frequency encoded illumination (mini-FEI) chip is presented for high-throughput super-resolution imaging using the spatial frequency shift (SFS) effect. A tunable full SFS scheme is achieved through propagating and…
Recently the strong demands in wireless communication requires expanding development for the application of RF MEMS (Radio Frequency micro electro mechanical systems) sensing devices such as micro-switches, tunable capacitors because it…
Soliton microcombs generated in nonlinear microresonators facilitate the photonic integration of timing, frequency synthesis, and astronomical calibration functionalities. For these applications, low-repetition-rate soliton microcombs are…
Whispering gallery mode (WGM) microdisk resonators are promising optical devices that confine light efficiently and enable enhanced nonlinear optical effects. This work presents a novel approach to reduce sidewall roughness in…
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is compatible with most of MEMS resonators and Resonant…
Multilayer metasurfaces provide substantially greater spectral design freedom than single-layer devices, yet their implementation in the visible and near-infrared remains limited by the complexity, cost, and low throughput of conventional…
Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…
The rising complexity of cutting-edge cryogenic systems is currently imposing challenging technical constraints to the monitoring of ultra-cold temperatures through standard commercially available sensors. Among different alternative…
Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…
We present design, fabrication and characterization of a MEMS VCSEL which utilizes a silicon-on-insulator wafer for the microelectromechanical system and encapsulates the MEMS by direct InP wafer bonding, which improves the protection and…