Related papers: Fabrication of MEMS Resonators in Thin SOI
Development of novel radiation-absorbent materials and devices for millimetre and submillimetre astronomy instruments is a research area of high interest, and with substantial engineering challenges. Alongside low-profile structure and…
We compare modulator designs on thick-film and thin-film silicon-on-insulator (SOI) substrates based on the carrier-depletion effect. This effect exhibits a lower junction capacitance as compared to its injection counterparts, leading to a…
We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused CO2 laser beam.…
A simple theoretical model which provides circuit parameters and resonance frequency of metallic thick resonators is presented. Two different topologies were studied: the original Pendry's SRR and spiral resonators of two and three turns.…
Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical…
Micro and nanomechanical resonators with ultra-low dissipation have great potential as useful quantum resources. The superfluid micromechanical resonators presented here possess several advantageous characteristics: straightforward…
The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sense or control physical, optical or chemical quantities, ICs…
Superconducting resonators integrated with Ge quantum wells (QWs) offer a promising platform for hybrid quantum devices. Yet, in the most common heterostructure architectures, they have so far been limited by sizable photon losses. Here, we…
In traveling-wave parametric amplifiers (TWPAs) low-loss capacitors are necessary to provide 50 $\Omega$ impedance matching to the increased inductance that is brought in by the nonlinear elements used for amplification, be it Josephson…
Fabrication of superconducting nanomechanical resonators for quantum research, detectors and devices traditionally relies on a lithographic process, resulting in oscillators with sharp edges and a suspended length limited to a few 100…
We present an argon ion beam milling process to remove the native oxide layer forming on aluminum thin films due to their exposure to atmosphere in between lithographic steps. Our cleaning process is readily integrable with conventional…
We present a planar design of a metamaterial exhibiting electromagnetically induced transparency that is amenable to experimental verification in the microwave frequency band. The design is based on the coupling of a split-ring resonator…
Optical whispering-gallery microresonators are useful tools in microphotonics, and nonlinear optics at very low threshold powers. Here, we present details about the fabrication of ultra-high-Q whispering-gallery-mode resonators made by…
We provide a detailed description of a general procedure by which a nano/micro-mechanical resonator can be calibrated using its thermal motion. A brief introduction to the equations of motion for such a resonator is presented, followed by a…
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with…
This study explores sol-gel methods for fabricating erbium-doped silica microtoroid resonators, addressing the limitations of conventional doping techniques and enhancing device scalability. We develop a reproducible sol-gel process that…
We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the…
Superconducting microwave resonators are reliable circuits widely used for detection and as test devices for material research. A reliable determination of their external and internal quality factors is crucial for many modern applications,…
Studying the dynamical behavior of micro- and nano-mechanical systems (MEMS and NEMS) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to be able to precisely monitor the mechanical…
The semicylindrical microresonator with relatively simple excitation with a plane wave is studied. The resonator is formed on the base of the dielectric/metal/dielectric structure, where the wave energy penetrates into resonator through a…