English
Related papers

Related papers: Fabrication of MEMS Resonators in Thin SOI

200 papers

Magnetic-field-resilient superconducting coplanar waveguide (SCPW) resonators are essential for developing integrated quantum circuits of various qubits and quantum memory devices. Molybdenum-Rhenium (MoRe), which is a disordered…

Superconductivity · Physics 2023-01-18 Chang Geun Yu , Bongkeon Kim , Yong-Joo Doh

Aluminium based platforms have allowed to reach major milestones for superconducting quantum circuits. For the next generation of devices, materials that are able to maintain low microwave losses while providing new functionalities, such as…

Other Condensed Matter · Physics 2022-05-03 Kazi Rafsanjani Amin , Carine Ladner , Guillaume Jourdan , Sebastien Hentz , Nicolas Roch , Julien Renard

3D-printing of radiofrequency (RF) cavity resonators could provide a cost-effective solution that enables rapid prototyping and design flexibility compared to traditional fabrication of full-metal cavities. In this work, the feasibility of…

Accelerator Physics · Physics 2025-12-18 David Sims , Benjamin Sims , Brian Wright , John W. Lewellen , Sergey V. Baryshev

We present the electro-thermal characterization of transition-edge sensor (TES) detectors suspended on Si membranes fabricated using a silicon-on-insulator (SOI) wafer. The use of an all-silicon fabrication platform, in contrast to the more…

Surface-acoustic-wave (SAW) resonators operating at gigahertz (GHz) frequencies are widely used in wireless telecommunication and quantum information processing. Successful implementation of such resonators calls for detailed microscopic…

Optics · Physics 2026-01-23 Shizai Chu , Suraj Thapa Magar , John Nichol , Keji Lai

In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…

Other Computer Science · Computer Science 2008-12-18 F. Maury , A. Pothier , A. Crunteanu , F. Conseil , P. Blondy

High Q-factor inductors are critical in designing high performance RF/microwave circuits on SOI technology. Substrate losses is a key limiting factor when designing inductors with high Q-factors. In this context, we report a substrate…

A widely tunable free spectral range (FSR) is essential for many optical microresonator applications, but achieving it remains a significant challenge. Recently, it has been experimentally demonstrated that side-coupling between two optical…

Optics · Physics 2026-04-09 M. Sumetsky

The development of superconducting qubit technology has shown great potential for the construction of practical quantum computers. As the complexity of quantum processors continues to grow, the need for stringent fabrication tolerances…

We present a design for a tunneling-current-assisted scanning near-field microwave microscope. For stable operation at cryogenic temperatures, making a small and rigid microwave probe is important. Our coaxial resonator probe has a length…

Mesoscale and Nanoscale Physics · Physics 2016-06-13 Hideyuki Takahashi , yoshinori imai , Atsutaka Maeda

This white paper presents a single-layer mask, found at https://github.com/Boulder-Cryogenic-Quantum-Testbed/simple-resonator-mask. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric…

Quantum computers are close to become a practical technology. Solid-state implementations based, for example, on superconducting devices strongly rely on the quality of the constituent materials. In this work, we fabricate and characterize…

Applied Physics · Physics 2021-12-08 M. S. Moeed , C. T. Earnest , J. H. Béjanin , A. S. Sharafeldin , M. Mariantoni

Fabrication of metasurfaces is ofthen time consuming and expensive, involving complex lithographic processes. The maskless fabrication of metasurfaces composed of rectangular Au bars is reported as a suitable alternative, providing…

Optics · Physics 2021-02-24 Michael McLamb , Yanzeng Li , Paige Stinson , Tino Hofmann

Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we…

The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures.…

Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures.…

Classical Physics · Physics 2013-01-22 Fabien Formosa , Adrien Badel , Hugues Favrelière

Microwave resonators with high quality factors have enabled many recent breakthroughs with superconducting qubits and photon detectors, typically operated in shielded environments to reduce the ambient magnetic field. Insufficient shielding…

Superconductivity · Physics 2015-05-14 C. Song , M. P. Defeo , K. Yu , B. L. T. Plourde

The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge towards building a large-scale quantum computer. In particular, transmons require a high-quality-factor…

Metasurfaces exploit the ability to engineer the optical phase, amplitude and polarization at subwavelength dimensions providing unprecedented control of light. The realization of the all dielectric approach to metasurfaces has led to the…

Optics · Physics 2019-01-17 Tomer Lewi , Nikita A. Butakov , Jon A. Schuller

Among various plasmonic waveguides, the metal-insulator-metal (MIM) type is the most promising for true subwavelength photonic integration. To date, many photonic devices based on MIM waveguides have been investigated, including resonators.…

Optics · Physics 2015-05-18 Zhanghua Han