Related papers: Fabrication of MEMS Resonators in Thin SOI
Magnetic Resonance Force Microscopy (MRFM) enables three-dimensional imaging of nuclear spin densities in nanoscale objects. Based on numerical simulations, we evaluate the performance of strained SiN resonators as force sensors and show…
We report on fabrication of a microtoroid resonator of high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3D)…
This paper reports the first demonstration of a magnet-free, high performance microelectromechanical system (MEMS) based circulator. An innovative circuit based on the commutation of MEMS resonators with high quality (Q) factor using RF…
Superconducting microcircuits and metamaterials are promising candidates for use in new generation cryogenic electronics. Their functionality is largely justified by the macroscopic distribution of electromagnetic fields in arranged unit…
Shear horizontal surface acoustic wave (SH-SAW) sensors are considered as a viable option for label-free, sensitive, real-time, and cost-effective detection. In this paper, we present the design, the fabrication and the characterization of…
We report on the development of millimeter-wave, lumped-element reflectionless filters using an advanced thin-film fabrication process. Based on previously demonstrated circuit topologies capable of achieving 50{\Omega} impedance match at…
Pulsed-laser dry printing of noble-metal microrings with a tunable internal porous structure, which can be revealed via an ion-beam etching post-procedure, was demonstrated. Abundance and average size of the pores inside the microrings were…
Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have promising prospects in many applications including high efficiency electro-optic modulators, optomechanics and nonlinear optics. This paper presents free-standing…
Here we present the microwave characterization of microstrip resonators made from aluminum and niobium inside a 3D microwave waveguide. In the low temperature, low power limit internal quality factors of up to one million were reached. We…
We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate…
This paper details the development of high-quality, c-axis oriented AlN thin films up to 2 {\mu}m thick, using sputtering on platinum-coated SOI substrates for use in piezoelectric MEMS. Our comprehensive studies illustrate how important…
Coupled superconducting transmission line resonators have applications in quantum information processing and fundamental quantum mechanics. A particular example is the realization of fast beam splitters, which however is hampered by…
Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…
Manipulating the propagation of electromagnetic waves through sub-wavelength sized artificial structures is the core function of metamaterials. Resonant structures, such as split ring resonators, play the role of artificial "atoms" and…
Superconducting resonators are now found in a broad range of applications that require high-fidelity measurement of low-energy signals. A common feature across almost all of these applications is the need for increased numbers of resonators…
Passive resonators have been widely used in MRI to manipulate RF field distributions. However, optimizing these structures using full-wave electromagnetic simulations is computationally prohibitive, particularly for large passive resonator…
The fabrication precision is one of the most critical challenges on the way to the creation of practical photonic circuits composed of coupled high Q-factor microresonators. While very accurate transient tuning of microresonators based on…
The prospect of building a quantum information processor underlies many recent advances ion trap fabrication techniques. Potentially, a quantum computer could be constructed from a large array of interconnected ion traps. We report on a…
The scanning electron microscope (SEM) delivers high resolution, high depth of focus and an image quality as if microscopic objects are seen by the naked eye. This makes it not only a powerful scientific instrument, but a tool inherently…
We present spiral resonators of thin film niobium (Nb) that exhibit large geometric inductance, high critical magnetic fields and high single photon quality factors. These low loss geometric inductors can be a compelling alternative to…