Related papers: Fabrication of MEMS Resonators in Thin SOI
We investigate the performance of microwave-frequency phononic crystal resonators fabricated on thin-film lithium niobate for integration with superconducting quantum circuits. For different design geometries at millikelvin temperatures, we…
Transmission electron beams (TEBs) have long been used to study and manipulate materials at nanometer scales. In the late 1970's, Cherns demonstrated surface pitting in Au films upon exposure to a 1MeV TEB and observed crystal dislocations…
The proximity coupled topological insulator / superconductor (TI/SC) bilayer system is a representative system to realize topological superconductivity. In order to better understand this unique state and design devices from the TI/SC…
Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we…
In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T$_c$ cuprate superconductor Bi$_2$Sr$_2$Ca$_1$Cu$_2$O$_{8+\delta}$. The mechanical readout is performed by capacitively coupling…
This paper presents the results of the characterisation of a thin, fully depleted pixel sensor manufactured in SOI technology on high-resistivity substrate with high momentum charged particles. The sensor is thinned to 70 $\mu$m and a thin…
Planar superconducting resonators are now being increasingly used at mK temperatures in a number of novel applications. They are also interesting devices in their own right since they allow us to probe the properties of both the…
Reservoir computing offers an energy-efficient alternative to deep neural networks (DNNs) by replacing complex hidden layers with a fixed nonlinear system and training only the final layer. This work investigates nanoelectromechanical…
Superconducting microwave resonators have recently gained a primary importance in the development of cryogenic applications, such as circuit quantum electrodynamics, electron spin resonance spectroscopy and particles detection for…
There are some issues with traditional whispering gallery mode (WGM) resonators like poor light extraction and a dense mode spectrum. In this paper we introduce a solution to these limitations by proposing open WGM (OWGM) resonators that…
We report the design and characterization of high frequency, resonant acousto-optic modulators (AOM) in a MEMS foundry process. The doubly-resonant cavity design, with short ($L{\sim}10.5\, {\mu}m$) acoustic and optical cavity lengths,…
Efficient generation of high-quality photon pairs is essential for modern quantum technologies. Micro-ring resonator is an ideal platform for studying on-chip photon sources due to strong nonlinear effect, resonant-enhanced optical fields,…
From the background of microwave-optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous…
Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron-microscopes in a wide variety…
Scalable architectures characterized by quantum bits (qubits) with low error rates are essential to the development of a practical quantum computer. In the superconducting quantum computing implementation, understanding and minimizing…
Typical microresonators exhibit a large frequency spacing between resonances and a limited tunability. This impedes their use in a large class of applications which require a resonance of the microcavity to coincide with a predetermined…
Nanoscale control of optical dispersion is essential for applications ranging from miniaturized spectrometers to color printing, all of which demand broadband spectral tunability. However, the Kramers-Kronig relations impose a fundamental…
Performance of superconducting resonators, particularly cavities for particle accelerators and micro cavities and thin film resonators for quantum computations and photon detectors has been improved substantially by recent materials…
We study the slowing, storing and releasing of microwave pulses in a superconducting circuits composed of two coplanar waveguide resonators and a superconducting transmon-type qubit. The quantum interference analogy to electromagnetically…
Superconducting microstrip resonators, which leverage kinetic inductance to probe electrodynamics, are sensitive tools for studying superconducting thin films at microwave frequencies. However, extracting the absolute superconducting…