This white paper presents a single-layer mask, found at https://github.com/Boulder-Cryogenic-Quantum-Testbed/simple-resonator-mask. It is designed for fabrication of superconducting microwave resonators towards 1:1 comparisons of dielectric losses from the metal-substrate interface. Finite-element electromagnetic simulations are used to determine participation ratios of the four major regions of the on-chip devices, as well as to confirm lack of crosstalk between neighboring devices and demonstrate coupling tunability over three orders of magnitude. This mask is intended as an open-source community resource for facilitating precise and accurate comparisons of materials in the single-photon, millikelvin regime.
@article{arxiv.2204.07202,
title = {Simple coplanar waveguide resonator mask targeting metal-substrate interface},
author = {Cameron J. Kopas and Ella Lachman and Corey Rae H. McRae and Yuvraj Mohan and Josh Y. Mutus and Ani Nersisyan and Amrit Poudel},
journal= {arXiv preprint arXiv:2204.07202},
year = {2022}
}