In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100).
@article{arxiv.0802.3767,
title = {Architecture for Integrated Mems Resonators Quality Factor Measurement},
author = {H. Mathias and F. Parrain and J. -P. Gilles and S. Megherbi and M. Zhang and Ph. Coste and A. Dupret},
journal= {arXiv preprint arXiv:0802.3767},
year = {2008}
}
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