Related papers: Architecture for Integrated Mems Resonators Qualit…
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink…
We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2…
The control of material loss mechanisms is playing an increasingly important role for improving coherence times of superconducting quantum devices. Such material losses can be characterized through the measurement of planar superconducting…
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…
Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…
We present an integrated scheme for dielectric drive and read-out of high-Q nanomechanical resonators which enables tuning of both the resonance frequency and quality factor with an applied DC voltage. A simple model for altering these…
We investigate the dynamics of mechanical resonators subject to excitations comprising of an oscillating or harmonic part, whose amplitude decays exponentially in time. We call these complex frequency excitations and show that the resulting…
In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS…
Applications in quantum information processing and photon detectors are stimulating a race to produce the highest possible quality factor on-chip superconducting microwave resonators. We have tested the surface-dominated loss hypothesis by…
The correct numerical calculation of the resonance characteristics and, principally, the quality factor $Q$ of contemporary photonic and plasmonic resonant systems is of utmost importance, since $Q$ defines the bandwidth and affects…
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…
The semicylindrical microresonator with relatively simple excitation with a plane wave is studied. The resonator is formed on the base of the dielectric/metal/dielectric structure, where the wave energy penetrates into resonator through a…
Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…
Carbon nanotube mechanical resonators have attracted considerable interest because of their small mass, the high quality of their surface, and the pristine electronic states they host. However, their small dimensions result in fragile…
High quality factor coplanar resonators are critical elements in superconducting quantum circuits. We describe the design, fabrication and measurement of stepped impedance resonators (SIRs), which are more compact in size than commonly used…
Compact inductor-capacitor (LC) resonators, in contrast to coplanar waveguide (CPW) resonators, have a simple lumped-element circuit representation but usually call for sophisticated finite-element method (FEM) simulations for an accurate…
We report ring resonators on a silicon germanium on silicon platform operating in the mid-infrared wavelength range around 3.5 - 4.6 {\mu}m with quality factors reaching up to one million. Advances in fabrication technology enable us to…
In this study, we investigate a novel design of an on-chip nested coupled ring resonator to enhance the quality factor and the effective length of the resonator. The configuration consists of an open ring and racetrack resonator, with…