Related papers: Architecture for Integrated Mems Resonators Qualit…
Superconducting resonators provide a convenient way to measure loss tangents of various dielectrics at low temperature. For the purpose of examining the microscopic loss mechanisms in dielectrics, precise measurements of the internal…
Resonator measurements are a simple but powerful tool to characterize a material's microwave response. The losses of a resonant mode are quantified by its internal quality factor $Q_\mathrm{i}$, which can be extracted from the scattering…
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
A two-dimensional photonic crystal microcavity design supporting a wavelength-scale volume resonant mode with a calculated quality factor (Q) insensitive to deviations in the cavity geometry at the level of Q~2x10^4 is presented. The…
The microwave cavity perturbation method is often used to determine material parameters (electric permittivity and magnetic permeability) at high frequencies and it relies on measurement of the resonator parameters. We present a method to…
Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…
Nanomechanical resonators with ultra-high quality factors have become a central element in fundamental research, enabling measurements below the standard quantum limit and the preparation of long-lived quantum states. Here, I propose that…
We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 \rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…
Memristors, uniquely characterized by their pinched hysteresis loop fingerprints, have attracted significant research interest over the past decade, due to their enormous potential for novel computation and artificial intelligence…
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…
Two critical characteristics for any MEMS resonator are the quality factor ($Q$) and the temperature coefficient of frequency ($TCF$). The connection between $Q$ and $TCF$ is demonstrated here with a phenomenological anharmonic oscillator…
SRF cavity quality factors can be accurately measured using RF-power based techniques only when the cavity is very close to critically coupled. This limitation is from systematic errors driven by non-ideal RF components. When the cavity is…
Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
This paper reports the first demonstration of a magnet-free, high performance microelectromechanical system (MEMS) based circulator. An innovative circuit based on the commutation of MEMS resonators with high quality (Q) factor using RF…
Nanomechanical resonators have applications in a wide variety of technologies ranging from biochemical sensors to mobile communications, quantum computing, inertial sensing, and precision navigation. The quality factor of the mechanical…