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Superconducting resonators with high quality factors are extremely sensitive detectors of the complex impedance of materials and devices coupled to them. This capability has been used to measure losses in multiple different materials and,…

Quantum Physics · Physics 2025-07-01 Jared Gibson , Zhanzhi Jiang , Angela Kou

This paper presents realistic system-level modelling and simulation of effective noise sources in a coupled resonating MEMS sensors. A governing set of differential equations are used to build a numerical model of a mechanical noise source…

Systems and Control · Electrical Eng. & Systems 2021-12-21 Vinayak Pachkawade

A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for…

Other Computer Science · Computer Science 2008-12-18 R. R. Mansour , S. Fouladi , M. Bakeri-Kassem

Material resonances are fundamentally important in the field of nano-photonics and optics. So it is of great interest to know what are the limits to which they can be tuned. The bandwidth of the resonances in materials is an important…

Optics · Physics 2023-04-20 Kshiteej J. Deshmukh , Graeme W. Milton

The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to…

Other Computer Science · Computer Science 2008-02-22 C. Durand , F. Casset , P. Ancey , F. Judong , A. Talbot , R. Quenouillere , D. Renaud , S. Borel , B. Florin , L. Buchaillot

Precise microwave measurements of sample conductivity, dielectric, and magnetic properties are routinely performed with cavity perturbation measurements. These methods require the accurate determination of quality factor and resonant…

Materials Science · Physics 2009-10-31 Paul J. Petersan , Steven M. Anlage

High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…

Mesoscale and Nanoscale Physics · Physics 2016-03-07 A. H. Ghadimi , D. J. Wilson , T. J. Kippenberg

Recent advances in glass fabrication technology have allowed for the development of high-precision inertial sensors in devices weighing in the order of grams. Gram-scale inertial sensors can be used in many applications with tight space or…

Instrumentation and Detectors · Physics 2024-08-13 Jonathan J. Carter , Pascal Birckigt , Oliver Gerberding , Sina M. Koehlenbeck

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

On-chip inductor design plays a critical role in the advancement of radio-frequency integrated circuits (RFICs). Inductors typically occupy a substantial portion of the chip area as their performance metrics, namely, inductance density and…

Practical design parameters of resonant metamaterials, such as loss tangent, are derived in terms of the quality factor $Q$ of the resonant effective medium permeability or permittivity. Through electromagnetic simulations of loop-based…

Optics · Physics 2015-06-26 Steven A. Cummer , Bogdan-Ioan Popa , Thomas H. Hand

The field of microelectromechanical Systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities…

Plasmonic resonators have drawn more attention due to the ability to confine light into subwavelength scale. However, they always suffer from a low quality (Q) factor owing to the intrinsic loss of metal. Here, we numerically propose a…

Milligram-scale resonators have been shown to be suitable for the creation of 3-mode optoacoustic parametric amplifiers, based on a phenomena first predicted for advanced gravitational-wave detectors. To achieve practical optoacoustic…

An original experimental method for determining the empirical probability distribution function (PDF) of the quality factor (Q) of a mode-stirred reverberation chamber is presented. Spectral averaging of S-parameters across a relatively…

Optics · Physics 2015-06-18 Luk R. Arnaut , Mihai I. Andries , Jerome Sol , Philippe Besnier

Mechanical resonators made with monolithic piezoelectric quartz crystals are promising for studying new physical phenomena. High mechanical quality factors ($Q$) exhibited by the mm-sized quartz resonators make them ideal for studying weak…

Applied Physics · Physics 2018-06-21 Alpo Valimaa , Jorge Santos , Caspar Ockeloen-Korppi , Mika Sillanpaa

In multi-qubit superconducting systems utilizing flip-chip technology, achieving high accuracy in resonator frequencies is of paramount importance, particularly when multiple resonators share a common Purcell filter with restricted…

Quantum Physics · Physics 2023-12-12 Yuan Li , Tianhui Wang , Jingjing Hu , Dengfeng Li , Shuoming An

Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…

Applied Physics · Physics 2019-11-26 Josh Javor , Alexander Stange , Corey Pollock , Nicholas Fuhr , David J. Bishop

We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned…

We describe an method that measures the unloaded quality factor $Q_0$, the external quality factor $Q_E$, and the cavity detuning $\Delta\omega$ with a recursive least-squares algorithm. It combines a large number of consecutive…

Accelerator Physics · Physics 2024-03-22 Volker Ziemann