Related papers: Architecture for Integrated Mems Resonators Qualit…
Mechanical resonances are used in a wide variety of devices; from smart phone accelerometers to computer clocks and from wireless communication filters to atomic force microscope sensors. Frequency stability, a critical performance metric,…
A new type of quartz resonance device for measurements of oscillations of the contact potential difference induced by modulated light is described. Special attention is devoted to the compensation of the constructive capacitance of the…
The quality factor and energy decay time of superconducting resonators have been measured as a function of material, geometry, and magnetic field. Once the dissipation of trapped magnetic vortices is minimized, we identify surface two-level…
Resonant metasurfaces are devices composed of nanostructured sub-wavelength scatterers that generate narrow optical resonances, enabling applications in filtering, nonlinear optics, and molecular fingerprinting. It is highly desirable for…
We demonstrate mid-IR integrated race-track resonators on a III-V semiconductor platform,InGaAs core epitaxially grown on InP. We have performed a complete characterization of the optical propagation losses at wavelength = 4.6 um and…
We derived S-parameter based expressions for the intrinsic quality factor of an arbitrary coupled multiport microwave cavity and non-ideal test fixture. Practical accuracy limitations of the obtained expressions specifically for…
Engineered micro- and nanomechanical resonators with ultra-low dissipation constitute the ideal systems for applications ranging from high-precision sensing such as magnetic resonance force microscopy, to quantum transduction between…
Variational algorithms are a promising paradigm for utilizing near-term quantum devices for modeling electronic states of molecular systems. However, previous bounds on the measurement time required have suggested that the application of…
We demonstrate the active tuning of all-dielectric metasurfaces exhibiting high-quality factor (high-Q) resonances. The active control is provided by embedding the asymmetric silicon meta-atoms with liquid crystals, which allows the…
We present numerical studies of two photonic crystal membrane microcavities, a short line-defect cavity with relatively low quality ($Q$) factor and a longer cavity with high $Q$. We use five state-of-the-art numerical simulation techniques…
We describe and demonstrate a method by which the nonlinear piezoelectric properties of a piezoelectric material may be measured by detecting the force that it applies on a suspended micromechanical resonator at one of its mechanical…
High-quality-factor ($Q$) mechanical resonators are essential components for precise sensing and control of mechanical motion at a quantum level. While amorphous materials such as SiN have been widely used in high-$Q$ mechanical resonators…
Applications of inertial measurement units are extremely diverse, and are expected to see a further increase in number due to current trends in robotics as well as recent advances in Micro Electromechanical sensors (MEMS). The traditional…
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant frequency can be down to 1 ppm/degrees C, preliminary…
We characterize the mechanical quality factor of micro-oscillators covered by a highly reflective coating. We test an approach to the reduction of mechanical losses, that consists in limiting the size of the coated area to reduce the strain…
We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical…
Absorbed power of nanoparticles during magnetic hyperthermia can be well determined from changes in the quality factor ($Q$ factor) of a resonator, in which the radiofrequency (RF) absorbent is placed. We present an order of magnitude…
This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…
Micro-mechanical resonators are widely used in modern sensing technology due to their high quality-factor (Q), enabling sensitive detection of various stimuli. However, the performance of these resonators in fluid environments is limited by…