Design and Fabrication of Micromachined Resonators
Other Computer Science
2012-02-15 v1
Abstract
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.
Keywords
Cite
@article{arxiv.1202.3048,
title = {Design and Fabrication of Micromachined Resonators},
author = {Ritesh Ray Chaudhuri and Joydeep Basu and Tarun Kanti Bhattacharyya},
journal= {arXiv preprint arXiv:1202.3048},
year = {2012}
}
Comments
7 pages, 12 figures