Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of 20mK for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler-Bernoulli theory. The measured internal quality factor of the 5μm-long resonator, 3.62×104, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity ∼6×10−20gHz−1/2.
@article{arxiv.1809.07215,
title = {High quality factor mechanical resonance in a silicon nanowire},
author = {D. E. Presnov and S. Kafanov and A. A. Dorofeev and I. V. Bozhev and A. S. Trifonov and Yu. A. Pashkin and V. A. Krupenin},
journal= {arXiv preprint arXiv:1809.07215},
year = {2018}
}