We report actuation and detection of gigahertz-range resonance frequencies in nano-crystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441 GHz. The cantilever-array design of the resonators translates the gigahertz-range resonant motion of micron-long cantilever elements to the displacement of the central supporting structure. Use of nano-crystalline diamond further increases the frequency compared to single crystal silicon by a factor of three. High clamping losses usually associated with micron-sized straight beams are suppressed in the periodic geometry of our resonators, allowing for high quality factors exceeding 20,000 above 500 MHz.
@article{arxiv.0710.2613,
title = {High quality factor gigahertz frequencies in nanomechanical diamond resonators},
author = {Alexei Gaidarzhy and Matthias Imboden and Pritiraj Mohanty and Janet Rankin and Brian W. Sheldon},
journal= {arXiv preprint arXiv:0710.2613},
year = {2009}
}
Comments
5 pages, two figures, one table, two-column format. Related papers can be found at http://nano.bu.edu/