With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an angled-etching methodology are reported. Resonance frequencies displayed evidence of significant compressive stress in doubly clamped diamond nanobeams, while cantilever resonance modes followed the expected inverse-length-squared trend. Q-factors on the order of 104 were recorded in high vacuum. Results presented here represent initial groundwork for future diamond-based nanomechanical systems which may be applied in both classical and quantum applications.
@article{arxiv.1309.1834,
title = {Nanomechanical resonant structures in single-crystal diamond},
author = {Michael J. Burek and Daniel Ramos and Parth Patel and Ian W. Frank and Marko Lončar},
journal= {arXiv preprint arXiv:1309.1834},
year = {2014}
}