Fabrication of Ultrathin Single-Crystal Diamond Membranes

B. A. Fairchild; P. Olivero; S. Rubanov; A. D. Greentree; F. Waldermann; R. A. Taylor; I. Walmsley; J. M. Smith; S. Huntington; B. C. Gibson; D. N. Jamieson; S. Prawer

doi:10.1002/adma.200801460

Fabrication of Ultrathin Single-Crystal Diamond Membranes

Materials Science 2016-09-01 v1

Authors: B. A. Fairchild , P. Olivero , S. Rubanov , A. D. Greentree , F. Waldermann , R. A. Taylor , I. Walmsley , J. M. Smith , S. Huntington , B. C. Gibson , D. N. Jamieson , S. Prawer

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Abstract

We demonstrate the fabrication of sub-micron layers of single-crystal diamond suitable for subsequent processing as demonstrated by this test ring structure. This method is a significant enabling technology for nanomechanical and photonic structures incorporating colour-centres. The process uses a novel double implant process, annealing and chemical etching to produce membranes of diamond from single-crystal starting material, the thinnest layers achieved to date are 210 nm thick.

Keywords

single-crystal diamond ultrathin membranes ion implantation chemical etching nanomechanical structures photonic structures colour-centres

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@article{arxiv.1608.08914,
  title  = {Fabrication of Ultrathin Single-Crystal Diamond Membranes},
  author = {B. A. Fairchild and P. Olivero and S. Rubanov and A. D. Greentree and F. Waldermann and R. A. Taylor and I. Walmsley and J. M. Smith and S. Huntington and B. C. Gibson and D. N. Jamieson and S. Prawer},
  journal= {arXiv preprint arXiv:1608.08914},
  year   = {2016}
}

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21 pages, 4 figures

Fabrication of Ultrathin Single-Crystal Diamond Membranes

Abstract

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