In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time.
@article{arxiv.1304.7953,
title = {Parameter Extraction and Support-Loss in MEMS Resonators},
author = {P. G. Steeneken and J. J. M. Ruigrok and S. Kang and J. T. M. van Beek and J. Bontemps and J. J. Koning},
journal= {arXiv preprint arXiv:1304.7953},
year = {2013}
}