Related papers: Parameter Extraction and Support-Loss in MEMS Reso…
A semi-analytical study of the acoustic radiation losses associated with various transverse vibration modes of a micromechanical (MEMS) annular resonator is presented. The quality factor, Q, of such resonators is of interest in many…
Two critical characteristics for any MEMS resonator are the quality factor ($Q$) and the temperature coefficient of frequency ($TCF$). The connection between $Q$ and $TCF$ is demonstrated here with a phenomenological anharmonic oscillator…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…
Practical design parameters of resonant metamaterials, such as loss tangent, are derived in terms of the quality factor $Q$ of the resonant effective medium permeability or permittivity. Through electromagnetic simulations of loop-based…
We present a novel method to determine the resonant frequency and quality factor of microwave resonators which is faster, more stable, and conceptually simpler than the yet existing techniques. The microwave resonator is irradiated at a…
The microwave cavity perturbation method is often used to determine material parameters (electric permittivity and magnetic permeability) at high frequencies and it relies on measurement of the resonator parameters. We present a method to…
The semicylindrical microresonator with relatively simple excitation with a plane wave is studied. The resonator is formed on the base of the dielectric/metal/dielectric structure, where the wave energy penetrates into resonator through a…
Resonator measurements are a simple but powerful tool to characterize a material's microwave response. The losses of a resonant mode are quantified by its internal quality factor $Q_\mathrm{i}$, which can be extracted from the scattering…
We numerically and experimentally investigate the phononic loss for superconducting resonators fabricated on a piezoelectric substrate. With the help of finite element method simulations, we calculate the energy loss due to…
The control of material loss mechanisms is playing an increasingly important role for improving coherence times of superconducting quantum devices. Such material losses can be characterized through the measurement of planar superconducting…
We present simulations of the dynamic and temperature dependent behavior of Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this…
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to…
We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned…
Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink…
Accurate electromagnetic (EM) feature extraction, including element characterization, eigenmodes, and field distributions, is essential for superconducting quantum circuit design. To streamline this process, we present a workflow built…
This article presents pedagogical explanation of retrieving the resonance parameters $Q_{L}$, $Q_{o}$ and $Q_{c}$ from both reflection and transmission measurement of microwave resonator. Here $Q_{L}$ stands for the total or loaded quality…
Applications in quantum information processing and photon detectors are stimulating a race to produce the highest possible quality factor on-chip superconducting microwave resonators. We have tested the surface-dominated loss hypothesis by…
Whereas the laser is nowadays an ubiquitous technology, applications for its microwave analogue, the maser, remain highly specialized, despite the excellent low-noise microwave amplification properties. The widespread application of masers…