Related papers: Fabrication of MEMS Resonators in Thin SOI
We report on the design, fabrication and characterization of silica microtoroid based cavity opto-electromechanical systems (COEMS). Electrodes patterned onto the microtoroid resonators allow for rapid capacitive tuning of the optical…
Nanofabrication of topological insulator (TI) devices is essential for accessing edge and interface states, but conventional lithography and etching compromise the atomically clean surfaces required for scanning tunneling microscopy and…
We have fabricated rhenium microwave resonators from epitaxial films. We have used thin films of different structural quality depending on their growth conditions. The resonators were coupled to a microwave transmission line which allows…
We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured…
This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…
Ultrahigh-frequency acoustic-phonon resonators usually require atomically flat interfaces to avoid phonon scattering and dephasing, leading to expensive fabrication processes, such as molecular beam epitaxy. In contrast, mesoporous thin…
Micro-Electro-Mechanical, so called 'MEMs,' vapor cells are a key component in atom-based quantum sensors, such as clocks, gyroscopes, electric field sensors and magnetometers. MEMs vapor cell fabrication for Rydberg atom radio frequency…
We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is…
Suspending devices on thin SiN membranes can limit their interaction with the bulk substrate and reduce parasitic capacitance to ground. While suspending devices on membranes is used in many fields including radiation detection using…
The ability to confine photons into structures with highly sub-wavelength volumes is extremely interesting for many applications such as sensing, nonlinear optics, and strong light-matter interactions. However, their realization is…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…
We present fast tunable superconducting microwave resonators fabricated from planar NbN on a sapphire substrate. The $3\lambda/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current which controls the kinetic…
Resonant metasurfaces are devices composed of nanostructured sub-wavelength scatterers that generate narrow optical resonances, enabling applications in filtering, nonlinear optics, and molecular fingerprinting. It is highly desirable for…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
Micro-mechanical resonators are building blocks of a variety of applications in basic science and applied electronics. This device technology is mainly based on well-established and reproducible silicon-based fabrication processes with…
MEMS devices are typical systems where multiphysics simulations are unavoidable. In this work, we present possible applications of 3-D self-assembled SOI (Silicon-on-Insulator) MEMS such as, for instance, thermal actuators and flow sensors.…
We present a micro-electromechanical system (MEMS) based method for the resist free patterning of nano-structures. Using a focused ion beam (FIB) to customize larger MEMS machines, we fabricate apertures as small as 50 nm on plates that can…
A promising way to store quantum information is by encoding it in the bosonic excitations of microwave resonators. This provides for long coherence times, low dephasing rates, as well as a hardware-efficient approach to quantum error…