Above Ic Micro-Power Generators for RF-Mems
Abstract
This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require similarly miniaturized power sources. Up to day, solid state thin film batteries are realized with mechanical masks. This method doesn't allow dimensions below a few mm^2 active area, and besides the whole process flow is done under controlled atmosphere so as to ensure materials chemical stability (mainly lithiated materials). Within this context, Microelectronics micro-fabrication procedures (photolithography, Reactive Ion Etching...) are used to reach both miniaturisation (100x100 m^2 targeted unit cell active area) and Above IC technological compatibility. All process steps developed here are realized in clean room environment.
Keywords
Cite
@article{arxiv.0711.3296,
title = {Above Ic Micro-Power Generators for RF-Mems},
author = {S. Oukassi and R. Salot and S. Bancel and J. -P. Pereira-Ramos},
journal= {arXiv preprint arXiv:0711.3296},
year = {2007}
}
Comments
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