During recent years, microelectronics helped to develop complex and varied technologies. It appears that many of these technologies can be applied successfully to realize Seebeck micro generators: photolithography and deposition methods allow to elaborate thin thermoelectric structures at the micro-scale level. Our goal is to scavenge energy by developing a miniature power source for operating electronic components. First Bi and Sb micro-devices on silicon glass substrate have been manufactured with an area of 1cm2 including more than one hundred junctions. Each step of process fabrication has been optimized: photolithography, deposition process, anneals conditions and metallic connections. Different device structures have been realized with different micro-line dimensions. Each devices performance will be reviewed and discussed in function of their design structure.
@article{arxiv.0711.3294,
title = {Energy Conversion Using New Thermoelectric Generator},
author = {Guillaume Savelli and Marc Plissonnier and Jacqueline Bablet and C. Salvi and J. M. Fournier},
journal= {arXiv preprint arXiv:0711.3294},
year = {2007}
}
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