相关论文: A bulk acoustic resonator with vertical electrodes…

Film bulk acoustic wave resonators (FBARs) underpin modern wireless communication by enabling compact, high-performance RF filters in modern smartphones. Traditionally, these FBAR devices work with quasi-plane waves of sound where the…

This work reports on the modeling, fabrication, and experimental characterization of a 13 GHz 30% Scandium-doped Aluminum Nitride (ScAlN) Overmoded Bulk Acoustic Resonator (OBAR) for high-frequency Radio Frequency (RF) applications, notably…

Bulk Acoustic Wave (BAW) filters find applications in radio frequency (RF) communication systems for Wi-Fi, 3G, 4G, and 5G networks. In the beyond-5G (potential 6G) era, high frequency bands (>8 GHz) are expected to require resonators with…

In the last decades, Bulk-Acoustic-Wave (BAW) filters have been essential components of 1G-to-4G radios. These devices rely on the high electromechanical coupling coefficient (kt2~7%), attained by Aluminum Nitride (AlN)…

Data rates and volume for mobile communication are ever-increasing with the growing number of users and connected devices. With the deployment of 5G and 6G on the horizon, wireless communication is advancing to higher frequencies and larger…

High overtone bulk acoustic resonators are essential components in microwave signal processing and emerging quantum technologies; however, conventional designs suffer from limited impedance matching, spurious mode interference, and…

A high-overtone bulk acoustic resonator (HBAR), in which a piezoelectric transducer is set on an acoustic cavity, has been attracting attention in both fundamental research and RF applications due to its scalability, high frequency, and…

This work presents the demonstration of lattice filters based on laterally excited bulk acoustic resonators (XBARs). Two filter implementations, namely direct lattice and layout-balanced lattice topologies, are designed and fabricated in…

Microwave frequency acousto-optic modulation is realized by exciting high overtone bulk acoustic wave resonances (HBAR resonances) in the photonic stack. These confined mechanical stress waves transmit exhibit vertically transmitting, high…

This paper presents a new and comprehensive equivalent circuit model for high overtone bulk acoustic resonators (HBARs). HBARs demonstrate several very sharp resonance modes distributed nearly periodically over a very wide frequency range.…

High-performance piezoelectric resonators are promising energy storage elements for piezoelectric power conversion due to their compact footprint and low loss at frequencies where conventional magnetic components become bulky and…

Solid-state quantum acoustodynamic (QAD) systems provide a compact platform for quantum information storage and processing by coupling acoustic phonon sources with superconducting or spin qubits. The multi-mode composite high-overtone bulk…

This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…

This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum (Pt) electrodes. FBARs with combinations of Pt and aluminum…

This work reports on the fabrication and characterization of an Au/ZnO/Pt-based high-overtone bulk acoustic resonator (HBAR) on SiC substrates. We evaluate its microwave characteristics comparing with Si substrates for…

A new class of wideband bandpass filters based on using thick metallic bars as microwave resonators, instead of common microstrip lines, is presented. These bars provide a series of advantages over fully planar printed technologies,…

Acoustic filters are preferred front-end solutions at sub-6 GHz due to their superior frequency selectivity compared to electromagnetic (EM) counterparts. With the ongoing development of 5G and the evolution toward 6G, there is a growing…

This report presents a robust composite resonator known as the high overtone bulk acoustic wave resonator (HBAR) for demonstrating experimentally the ability of the resonator to tune the envelope of the spectrum by applying dc bias. The…

High-overtone bulk acoustic wave resonators (HBARs) promise advanced phononics, yet achieving nonlinearity remains challenging. We demonstrate a radiation-pressure-type parametric interaction between GHz HBARs and low-frequency flexural…

This report presents the realization and characterization of a robust composite resonator i.e. high overtone bulk acoustic wave resonator (HBAR) and the changes happening to the resonance peaks once it undergoes mass loading which has got…