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We use room temperature ion beam assisted sputtering (IBAS) to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport and magnetization measurements at variable temperatures,…

Ga2O3 thin films were deposited by reactive magnetron sputtering from a liquid gallium target. The influence of deposition temperature, substrate type, and discharge parameters on the structural and electrical properties was systematically…

材料科学 · 物理学 2026-05-01 Petr Novak , Jan Koloros , Stanislav Haviar , Jiri Rezek , Pavel Baroch

Nb3Sn films were fabricated by multilayer sequential sputtering on Nb at substrate temperatures ranging from room temperature to 250 {\deg}C. The multilayers were then annealed inside a separate vacuum furnace at 950 {\deg}C for 3h. The…

Thin films of the recently discovered magnesium diboride (MgB2) intermetalic superconducting compound have been grown using a magnetron sputtering deposition technique followed by in-situ annealing at 830 C. High quality films were obtained…

超导电性 · 物理学 2009-11-07 R. Vaglio , M. G. Maglione , R. Di Capua

MgB2 thin films were deposited on SiC buffered Si substrates by sequential electron beam evaporation of B-Mg bilayer followed by in-situ annealing. The application of a SiC buffer layer enables the maximum annealing temperature of 830 C.…

超导电性 · 物理学 2009-11-11 S. Chromik , J. Huran , V. Strbik , M. Spankova , I. Vavra , W. Bohne , J. Rohrich , E. Strub , P. Kovac , S. Stancek

The origin of ferromagnetism in nanoparticles of nonmagnetic oxides is an interesting area of research. In the present work, transport properties of niobium thin films, with beta-Ga2O3 nanoparticles embedded within them, are presented.…

Superconducting NbTiN thin films have garnered extensive interest due to their use in Superconducting Nanowire Single-Photon Detectors (SNSPDs) and other low-temperature applications for potential use in quantum computing and…

超导电性 · 物理学 2023-11-27 Siddhesh Sanjay Yeram , Sonam Bhakat , Subhashree S. Dash , Avradeep Pal

Niobium is a practical material platform for superconducting microwave circuits; however, device-level performance can vary significantly depending on film growth and processing conditions. We compare three epitaxial Nb films grown on…

Superconducting thin films have been prepared in a two-step in-situ process, using the Mg-B plasma generated by pulsed laser ablation. The target was composed of a mixture of Mg and MgB2 powders to compensate for the volatility of Mg and…

超导电性 · 物理学 2009-11-07 D. H. A. Blank , H. Hilgenkamp , A. Brinkman , D. Mijatovic , G. Rijnders , H. Rogalla

We prepare NbN thin films by DC magnetron sputtering on [100] GaAs substrates, optimise their quality and demonstrate their use for efficient single photon detection in the near-infrared. The interrelation between the Nb:N content, growth…

A thin film technology compatible with multilayer device fabrication is critical for exploring the potential of the 39-K superconductor magnesium diboride for superconducting electronics. Using a Hybrid Physical-Chemical Vapor Deposition…

Porous silicon, obtained by electrochemical etching, has been used as a substrate for the growth of nanoperforated Nb thin films. The films, deposited by UHV magnetron sputtering on the porous Si substrates, inherited their structure made…

Al2O3 thin films have been deposited at substrate temperatures between 500{\deg}C to 600{\deg}C by reactive magnetron sputtering using an additional arbitrary substrate bias to tailor the energy distribution of the incident ions. The films…

等离子体物理 · 物理学 2015-06-16 Marina Prenzel , Annika Kortmann , Adrian Stein , Achim von Keudell , Farwah Nahif , Jochen M. Schneider

We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450{\deg}C and…

超导电性 · 物理学 2010-10-27 Savio Fabretti , Patrick Thomas , Markus Meinert , Andy Thomas

Scaling superconducting digital circuits requires fundamental changes in the current material set and fabrication process. The transition to 300 mm wafers and the implementation of advanced lithography are instrumental in facilitating…

Superconducting thin films of MgB2 were deposited by Pulsed Laser Deposition on magnesium oxide and sapphire substrates. Samples grown at 450C in an argon buffer pressure of about 10-2 mbar by using a magnesium enriched target resulted to…

Originally developed technique based on generation of plasma-cluster flux emitted from cathode spots at surface of an integrally cold cathode has been applied for deposition of niobium superconductive (thick) film materials. Possibility for…

材料科学 · 物理学 2018-02-12 K. Pavlov , A. Savin , J. Laurila , P. Vuoristo , K. Gorchakov , S. Gorchakova

Superconducting MgB2 thin films were prepared on 50-micrometer-thick, flexible polyamide Kapton-E foils by vacuum co-deposition of Mg and B precursors with nominal thickness of about 100 nm and a special ex-situ rapid annealing process in…

超导电性 · 物理学 2009-11-07 P. Kus , A. Plecenik , L. Satrapinsky , Y. Xu , R. Sobolewski

We have studied the properties of relatively thick (about 120 nm) magnetic composite films grown by pulsed laser deposition method using (GaSb)$_{0.59}$(MnSb)$_{0.41}$ eutectic compound as a target for sputtering. For the studied films we…

The superconducting critical temperature (Tc > 15K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multi-pixel imaging with advanced detectors. The drive for…

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