相关论文: Channel resolution enhancement through scalability…
We adapted a conventional microscope for projection photolithography using an ultraviolet (UV) light-emitting diode (LED) as a light source. The use of a UV LED provides the microscope projector with several advantages in terms of…
Miniaturization of light-emitting diodes (LEDs) can enable high-resolution augmented and virtual reality displays and on-chip light sources for ultra-broadband chiplet communication. However, unlike silicon scaling in electronic integrated…
We fabricated thin-films made from polydimethylsiloxane (PDMS) with embedded high-index (n~1.9-2.2) microspheres for super-resolution imaging applications. To control the position of microspheres, such films can be translated along the…
Optical metasurfaces, consisting of subwavelength-scale meta-atom arrays, hold great promise to overcome fundamental limitations of conventional optics. Scalable nanomanufacturing of metasurfaces with high uniformity and reproducibility is…
A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap…
Photonic Integrated Circuits (PICs) are essential for high-speed and compact optoelectronic applications, yet efficient optical coupling to PIC remains a critical challenge, where minimizing insertion losses is crucial for high-performance…
We report subwavelength-thick, polarization insensitive micro-lenses operating at telecom wavelength with focal spots as small as 0.57 wavelengths and measured focusing efficiency up to 82%. The lens design is based on high contrast…
We describe a micro-fabrication method to create concave features with ultra-low surface roughness in silica, either on the end facets of optical fibers or on flat substrates. The machining uses a single focused CO2 laser pulse. Parameters…
Two-dimensional (2D) nanochannels have emerged as a pivotal platform for exploring nanoscale hydrodynamics and electrokinetics. Conventional fabrication methods to make nanochannels often introduce polymer contamination and require lengthy…
Although several optical techniques have been recently developed in order to overcome the resolution limit in microscopy, the imaging of sub-wavelength features is still a real challenge. In practise, super-resolution techniques remain…
Moving towards significantly smaller nanostructures, direct structuring techniques such as electron beam lithography approach fundamental limitations in feature size and aspect ratios. Application of nanostructures like diffractive X-ray…
Nanofabrication of topological insulator (TI) devices is essential for accessing edge and interface states, but conventional lithography and etching compromise the atomically clean surfaces required for scanning tunneling microscopy and…
Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for…
Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional…
We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex…
Achieving state-of-the-art optical data storage requires raising device capacity well above commercial standards. This requires media structured at a much smaller scale and enabling readout at a shorter wavelength. Current CDs, DVDs and…
Even though submicron silicon waveguides have been proposed for dense integration of photonic devices, to date the lightwave circuits on the market mainly rely on waveguides with micron-scale core dimensions. These larger waveguides feature…
Optical pulse shaping stands as a formidable technique in ultrafast optics, radio-frequency photonics, and quantum communications. While existing systems rely on bulk optics or integrated platforms with planar waveguide sections for spatial…
A convenient method has been developed to thin electron beam fabricated Silicon nanopillars under controlled surface manipulation by transforming the surface of the pillars to an oxide shell layer followed by the growth of sacrificial…
We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused CO2 laser beam.…