相关论文: Optomechanical characterization of silicon nitride…
We investigate the electromechanical actuation of a pair of suspended silicon nitride membranes forming a monolithic optomechanical array. By controlling the membrane resonators' tensile stress via a piezoelectrically controlled compressive…
We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…
A detailed investigation of the structural and vibrational properties of various prestressed silicon nitride membranes patterned with one-dimensional photonic crystal structures is presented. The tensile stress-related deformation of the…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode…
We propose a realistic system with separated optical and mechanical degrees of freedom, in which a high-mechanical-quality silicon nitride membrane is placed upon a high-optical-quality whispering gallery microcavity. The strongly enhanced…
Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal…
We demonstrate a method to optically map multiple modes of mechanical structures simultaneously. The fast and robust method, based on a modified phase-lock-loop, is demonstrated on a silicon nitride membrane and compared with three…
Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembrane resonators have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an…
Design of a doubly-clamped beam structure capable of localizing mechanical and optical energy at the nanoscale is presented. The optical design is based upon photonic crystal concepts in which patterning of a nanoscale-cross-section beam…
We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is…
Optomechanical arrays made of structured flexible dielectrics are a promising system for exploring quantum and many-body optomechanical phenomena. We generalize investigations of the optomechanical properties of periodic arrays of…
We demonstrate parametric coupling between two modes of a silicon nitride membrane. We achieve the coupling by applying an oscillating voltage to a sharp metal tip that approaches the membrane surface to within a few 100 nm. When the…
Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to enhance and optimise their functionality for devices and applications. Here we report…
We present the results of theoretical and experimental studies of dispersively coupled (or "membrane in the middle") optomechanical systems. We calculate the linear optical properties of a high finesse cavity containing a thin dielectric…
We describe an optomechanical device consisting of a fiber-based optical cavity containing a silicon nitiride membrane. In comparison with typical free-space cavities, the fiber-cavity's small mode size (10 {\mu}m waist, 80 {\mu}m length)…
We demonstrate the thermo-optic properties of silicon-rich silicon nitride (SRN) films deposited using plasma-enhanced chemical vapor deposition (PECVD). Shifts in the spectral response of Mach-Zehnder Interferometers (MZIs) as a function…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
Synchronization, the emergence of spontaneous order in coupled systems, is of fundamental importance in both physical and biological systems. We demonstrate the synchronization of two dissimilar silicon nitride micromechanical oscillators,…