相关论文: Graphene Squeeze-Film Pressure Sensors

The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is…

Most microphones operate by detecting the sound-pressure induced motion of a membrane. In contrast, here we introduce a microphone that operates by monitoring the sound-pressure-induced modulation of the compressibility of air. By driving a…

Squeeze film pressure sensors, exploiting the dynamical modification of the mechanical properties of oscillating elements due to the compression of a fluid in a small gap region, allow for direct and absolute pressure measurements. This…

We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the…

Graphene has good mechanical properties including large Young's modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene based sensors has been limited due to difficulties in fabrication,…

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended…

In recent years, pressure sensors have been widely used as crucial technology components in industrial, healthcare, consumer electronics, and automotive safety applications. With the development of intelligent technologies, there is a…

Here it is shown that graphene membranes that separate 2 gases at identical pressure are deflected by osmotic pressure. The osmotic pressure is a consequence of differences in gas permeation rates into a graphene enclosed cavity. The…

Straining graphene results in the appearance of a pseudo-magnetic field which alters its local electronic properties. Applying a pressure difference between the two sides of the membrane causes it to bend/bulge resulting in a resistance…

To realize nanomechanical graphene-based pressure and gas sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electro-mechanical…

Flexible pressure sensors are an attractive area of research due to their potential applications in biomedical sensing and wearable devices. Among flexible and wearable pressure sensors, capacitive pressure sensors show significant…

Porous, atomically thin graphene membranes have interesting properties for filtration and sieving applications because they can accommodate small pore sizes, while maintaining high permeability. These membranes are therefore receiving much…

We report on the realization of ultrasensitive absolute pressure sensors based on silicon nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned, ultrathin (50 nm), large area (0.25 mm2) films, suspended…

Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform…

Mechanical resonators based on low-dimensional materials are promising for force and mass sensing experiments. The force sensitivity in these ultra-light resonators is often limited by the imprecision in the measurement of the vibrations,…

Atomically thin two-dimensional materials such as graphene exhibit extremely high-pressure sensitivity compared to the commercially used pressure sensors due to their high surface-to-volume ratio and excellent mechanical properties. The…

Graphene membranes act as highly sensitive transducers in nanoelectromechanical devices due to their ultimate thinness. Previously, the piezoresistive effect has been experimentally verified in graphene using uniaxial strain in graphene.…

The excellent electronic and mechanical properties of graphene provide a perfect basis for high performance flexible electronic and sensor devices. Here, we present the fabrication and characterization of flexible graphene based Hall…

Graphene is an atomically thin metallic membrane capable of sustaining reversible strain and offers a tempting prospect of controlling its optoelectronic properties via strain. Graphenes exceptional mechanical flexibility and tensile…

The enormous stiffness and low density of graphene make it an ideal material for nanoelectromechanical (NEMS) applications. We demonstrate fabrication and electrical readout of monolayer graphene resonators, and test their response to…