相关论文: Control of Material Damping in High-Q Membrane Mic…
We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…
Mechanical dissipation poses an ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test…
Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors ($Q$s). Despite their popularity, the origin of the limiting loss…
We investigate the influence of gold thin-films subsequently deposited on a set of initially bare, doubly clamped, high-stress silicon nitride string resonators at room temperature. Analytical expressions for resonance frequency, quality…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…
High-quality-factor ($Q$) mechanical resonators are essential components for precise sensing and control of mechanical motion at a quantum level. While amorphous materials such as SiN have been widely used in high-$Q$ mechanical resonators…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
The dielectric loss of silicon nitride (Si$_3$N$_4$) limits the performance of microwave-frequency devices that rely on this material for sensing, signal processing, and quantum communication. Using superconducting resonant circuits, we…
Silicon nitride membranes are a powerful and ubiquitous optomechanical resonator technology, enabling high mechanical Q, low optical loss, and enhanced optomechanical coupling via a panoply of strain-, phononic-, and photonic-crystal…
Low-loss superconducting rf devices are required when used for quantum computation. Here, we present a series of measurements and simulations showing that conducting losses in the packaging of our superconducting resonator devices affect…
We measure the frequency dependence of the mechanical quality factor (Q) of SiN membrane oscillators and observe a resonant variation of Q by more than two orders of magnitude. The frequency of the fundamental mechanical mode is tuned…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…
Mechanical resonators made with monolithic piezoelectric quartz crystals are promising for studying new physical phenomena. High mechanical quality factors ($Q$) exhibited by the mm-sized quartz resonators make them ideal for studying weak…
In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane,…
Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The…
We investigate the effect of free electrons on the quality factor (Q) of a metallic nanomechanical resonator in the form of a thin elastic beam. The flexural and longitudinal modes of the beam are modeled using thin beam elasticity theory,…
Practical design parameters of resonant metamaterials, such as loss tangent, are derived in terms of the quality factor $Q$ of the resonant effective medium permeability or permittivity. Through electromagnetic simulations of loop-based…
Dissipation dilution enables extremely low linear loss in stressed, high-aspect ratio nanomechanical resonators, such as strings or membranes. Here, we report on the observation and theoretical modelling of nonlinear dissipation in such…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…