相关论文: Cavity optomechanics with stoichiometric SiN films
Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies.…
Thermal noise is a major obstacle to observing quantum behavior in macroscopic systems. To mitigate its effect, quantum optomechanical experiments are typically performed in a cryogenic environment. However, this condition represents a…
We describe a cryogenic cavity-optomechanical system that combines Si3N4 membranes with a mechanically-rigid Fabry-Perot cavity. The extremely high quality-factor frequency products of the membranes allow us to cool a MHz mechanical mode to…
Ponderomotive squeezing of light, where a mechanical oscillator creates quantum correlations between the phase and amplitude of the interacting light field, is a canonical signature of the quantum regime of optomechanics. At room…
The sensitivity of laser interferometers can be pushed into regimes that enable the direct observation of quantum behaviour of mechanical oscillators. In the past, membranes with subwavelength thickness (thin films) have been proposed as…
We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…
We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical…
We study the optomechanical properties of stoichiometric SiN resonators through a combination of spectroscopic and interferometric imaging techniques. At room temperature, we demonstrate ultrahigh quality factors of $5 \times 10^7$ and a $f…
We report on low mechanical loss in a high-stress silicon nitride (Si_{3}N_{4}) membrane at temperatures below 100 mK. We isolate a membrane via a phononic shield formed within a supporting silicon frame, and measure the mechanical quality…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
In recent years quantum phenomena have been experimentally demonstrated on variety of optomechanical systems ranging from micro-oscillators to photonic crystals. Since single photon couplings are quite small, most experimental approaches…
We realise a simple and robust optomechanical system with a multitude of long-lived ($Q>10^7$) mechanical modes in a phononic-bandgap shielded membrane resonator. An optical mode of a compact Fabry-Perot resonator detects these modes'…
Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane…
All quantum optomechanics experiments to date operate at cryogenic temperatures, imposing severe technical challenges and fundamental constraints. Here we present a novel design of on-chip mechanical resonators which exhibit fundamental…
Soft-clamped silicon nitride membrane resonators reach coherence times tau in excess of 100 ms at milliKelvin bath temperatures. However, harnessing strong optomechanical coupling in dry dilution refrigerators remains challenging due to…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
We study the quantum dynamics of the cavity optomechanical system formed by a Fabry-Perot cavity with a thin vibrating membrane at its center. We first derive the general multimode Hamiltonian describing the radiation pressure interaction…
Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling…
A promising route to novel quantum technologies are hybrid quantum systems, which combine the advantages of several individual quantum systems. We have realized a hybrid atomic-mechanical experiment consisting of a SiN membrane oscillator…
We demonstrate feedback cooling of a millimeter-scale, 40 kHz SiN membrane from room temperature to 5 mK (3000 phonons) using a Michelson interferometer, and discuss the challenges to ground state cooling without an optical cavity. This…