相关论文: Design, Fabrication and Characterization of a Piez…
We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…
In this study, we developed a top/down methodology for behavioral and structural modeling of multi-domain microsystems. Then, we validated this methodology through a study case : a piezoelectric microgenerator. We also proved the…
This paper presents a micro electrostatic vibration-toelectricity energy converter. For the 3.3 V supply voltage and 1cm2 chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In…
We propose a novel radio-frequency (RF) receiving architecture based on micro-electro-mechanical system (MEMS) and optical coherent detection module. The architecture converts the received electrical signal into mechanical vibration through…
Piezoelectric microresonators are indispensable in wireless communications, and underpin radio frequency filtering in mobile phones. These devices are usually analyzed in the quasi-(electro)static regime with the magnetic field effectively…
A fully electrically interfaced chip-scale Micro-Electro-Mechanical System based higher-order harmonic generator has multitudes of applications as it can simultaneously facilitate monolithic integration with on-chip electronics and offer…
Piezoelectric energy harvester scavenges mechanical vibrations and generates electricity. Researchers have strived to optimize the electromechanical structures and to design necessary external power management circuits, aiming to deliver…
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to…
We present the coupled oscillator: a new mechanism for signal amplification with widespread application in metrology. We introduce the mechanical theory of this framework, and support it by way of simulations. We present a particular…
CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors.…
In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum…
We present the first experimental study of a new type of power recycling microwave interferometer designed for low noise measurements. This system enhances sensitivity to phase fluctuations in a Device Under Test, independent of input power…
Ceramics based piezoelectric generators are known for their high energy density and poor flexibility. In this work, v_r-PMN-0.3PT/PDMS 2-2 composite with optimum PMN-0.3PT content (v_r) was designed that demonstrated enhanced output energy…
In the framework of energy scavenging for applications in flexible/strechable electronics, hybrid piezoelectric nanogenerators, made up with Zinc oxyde nanorods, embedded in a polymeric matrix, and growth on a flexible polymeric support,…
Piezoelectric micro-electro-mechanical systems have significant market potential owing to their superior capabilities of transduction to those of standard capacitive and piezoresistive devices. However, piezoelectric films are often lossy,…
In this study, we propose a design methodology for a piezoelectric energy-harvesting device optimized for maximal power generation at a designated frequency using topology optimization. The proposed methodology is adapted to the design of a…
Two-dimensional (2D) layered materials are ideal for micro- and nanoelectromechanical systems (MEMS/NEMS) due to their ultimate thinness. Platinum diselenide (PtSe$_{2}$), an exciting and unexplored 2D transition metal dichalcogenides (TMD)…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
An application-specific Josephson generator is being developed as an on-chip calibration source for single-microwave-photon detectors operating below $T \sim $100 mK in the frequency range from 110 to 170 GHz. The targeted calibration power…
Tuning and reconfiguring nanophotonic components is needed to realize systems incorporating many components. The electrostatic force can deform a structure and tune its optical response. Despite the success of electrostatic actuators, they…