相关论文: Design, Fabrication and Characterization of a Piez…
This paper presents the analysis of an efficient alternative interface circuit for MEMS electrostatic energy harvesters. It is entirely composed by diodes and capacitors. Based on modeling and simulation, the anti-phase gap-closing…
Optical frequency division relies on optical frequency combs to coherently translate ultra-stable optical frequency references to the microwave domain. This technology has enabled microwave synthesis with ultralow timing noise, but the…
We report on the development of a novel flexible piezo/pyro-electric nanogenerator (PPNG) that combines a uniform film of poly(vinylidene fluoride) (PVDF) infiltrated over vertically supported SiO2 nanowires (NWs) to enhance both…
CMOS pixel sensors with a small collection electrode combine the advantages of a small sensor capacitance with the advantages of a fully monolithic design. The small sensor capacitance results in a large ratio of signal-to-noise and a low…
This paper presents a fully-integrated CMOS temperature sensor for densely-distributed thermal monitoring in systems on chip supporting dynamic voltage and frequency scaling. The sensor front-end exploits a sub-threshold PMOS-based circuit…
The mechanical and electrical response of acoustophoretic microfluidic devices attached to an ac-voltage-driven piezoelectric transducer is studied by means of numerical simulations. The governing equations are formulated in a variational…
This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…
A piezoelectric voltage coupled microwave reentrant cavity has been developed. The central cavity post is bonded to a piezoelectric actuator allowing the voltage control of small post displacements over a high dynamic range. We show that…
MIMOSIS is a CMOS Monolithic Active Pixel Sensor developed to equip the Micro Vertex Detector of the Compressed Baryonic Matter (CBM) experiment at FAIR/GSI. The sensor will combine an excellent spatial precision of $5~\mu m$ with a time…
This paper investigates the performance of the micro-electro-mechanical systems resonant sensor used for particle detection and concentration measurement. These fine and ultra-fine particles such as particulate matter (PM), ferrous…
Active photonic integrated circuits (PICs) in the visible spectrum are essential for on-chip applications, requiring low-loss waveguides with broad transparency and efficient, low-power phase modulation. Here, we demonstrate a compact,…
We present the measurement of squeezed light generation using an engineered optomechanical system fabricated from a silicon microchip and composed of a micromechanical resonator coupled to a nanophotonic cavity. Laser light is used to…
Conventional wireless power transfer systems consist of a microwave power generator and a microwave power receiver separated by some distance. To realize efficient power transfer, the system is typically brought to resonance, and the…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
This novel piezoelectric zinc oxide (ZnO) thin film microcantilever was fabricated by micromachining technique. To release the cantilever, wet anisotropic etching of Silicon (Si) was performed by tetramethyl ammonium hydroxide (TMAH). The…
We report the design, elaboration and measurements of an innovative planar thermoelectric (TE) devices made of a large array of small mechanically suspended nanogenerators (nanoTEG). The miniaturized TE generators based on SiN membranes are…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Semiconducting piezoelectric materials have attracted considerable interest due to their central role in the emerging field of piezotronics, where the development of a piezo-potential in response to stress or strain can be used to tune the…
This study introduces a two-degree-of-freedom piezoelectric energy harvester designed to harness rotational motion as an energy source. The harvester is built using a cut-out beam, which enables the first two resonant frequencies to be…
Frequency generators are widely used in electronics. Here, we report the design and experimental realization of a memristive frequency generator employing a unique combination of only digital logic gates, a single-supply voltage and a…