相关论文: Design, Fabrication and Characterization of a Piez…
Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…
Recently, there have been dramatic advances in the miniaturization of electromechanical devices. Most of the micro- and nanoelectromechanical systems (MEMS-NEMS) operate in the resonant modes1. The micron-, and, the more, the…
We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…
The use of integrated MicroElectroMechanical systems (MEMS) is recently spread thanks to their improved sensitivity, accuracy and reliability. Accurate preliminary computations born from the need of high precision in the manufacturing…
Flexible piezoelectric devices made of polymeric materials are widely used for micro- and nano-electro-mechanical systems. In particular, numerous recent applications concern energy harvesting. Due to the importance of computational…
We present an ultra-low noise, high-voltage driver suited for use with piezoelectric actuators and other low-current applications. The architecture uses a flyback switching regulator to generate up to 250V in our current design, with an…
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…
This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe…
Ambient energy harvesting has been in recent years the recurring object of a number of research efforts aimed at providing an autonomous solution to the powering of small-scale electronic mobile devices. Among the different solutions,…
This paper reports on our research in developing a micro power generation system based on gas turbine engine and piezoelectric converter. The micro gas turbine engine consists of a micro combustor, a turbine and a centrifugal compressor.…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…
Continuous monitoring of voltages ranging from tens to hundreds of kV over environmental conditions, such as temperature, is of great interest in power grid applications. This is typically done via instrument transformers. These…
This work studies a broadband graded metamaterial, which integrates the piezoelectric energy harvesting function targeting low-frequency structural vibrations, lying below 100 Hz. The device combines a graded metamaterial with beam-like…
Novel non-volatile memory devices based on ferroelectric thin films represent a promising emerging technology that is ideally suited for neuromorphic applications. The physical switching mechanism in such films is the nucleation and growth…
We report generation of electrical energy from nonlinear mechanical noises available in the ambient environment using optimized piezo transduction mechanisms. Obtaining energy from an ambient vibration has been attractive for remotely…
This study presents a novel piezoelectric beam structure for acoustic energy harvesting. The beams have been designed to maximize output energy in areas where the noise level is loud such as highway traffic. The beam consists of two layers…
We introduce herein the advanced application of low pressure plasma procedures for the development of piezo and triboelectric mode I hybrid nanogenerators. Thus, plasma assisted deposition and functionalization methods are presented as key…
We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7 GHz microwave signal to a mechanical wave in a single mode of a 1 micron-wide waveguide. We measure a -12 dB conversion efficiency that is limited by…
We propose a new type of magnetoelectric memory device that stores magnetic easy-axis information or pseudo-magnetization, rather than a definite magnetization direction, in piezoelectric/ferromagnetic (PE/FM) heterostructures.…
In the context of engineered quantum systems, there is a demand for superconducting tunable devices able to operate with high Q-factors at power levels equivalent to only a few photons. In this work, we developed a 3D microwave reentrant…