相关论文: Design, Fabrication and Characterization of a Piez…

The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase…

We describe and demonstrate a method by which the nonlinear piezoelectric properties of a piezoelectric material may be measured by detecting the force that it applies on a suspended micromechanical resonator at one of its mechanical…

Nanogenerators based on piezoelectric materials convert ever-present mechanical vibrations into electrical power for energetically autonomous wireless and electronic devices. Nanowires of piezoelectric polymers are particularly attractive…

Compact, low-power analog RF components are essential for next-generation microwave electronics and wireless systems. We demonstrate an all-electric integrated piezo-magnonic microelectromechanical system that enables efficient voltage…

This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require…

Nanogenerators and self-powered nanosensors have shown the potential to power low-consumption electronics and human-machine interfaces, but their practical implementation requires reliable, environmentally friendly and scalable, processes…

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…

This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and…

Magnetic sensing is present in our everyday interactions with consumer electronics, and also demonstrates potential for measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the…

This paper compares the performances of a vibrationpowered electrical generators using PZT piezoelectric ceramic associated to two different power conditioning circuits. A new approach of the piezoelectric power conversion based on a…

Due to the rapid growth in demand for power for sensing devices located in remote locations, scientists' attention has been drawn to vibration energy harvesting as an alternative to batteries. As a result of over two decades of micro-scale…

This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…

Nonlinear dynamics of a two-side electro-statically actuated capacitive micro-beam is studied. The piezoelectric actuation leads to the generation of an axial force along the length of the micro-beam and this is used as a tuning tool to…

This work relates to a novel piezoelectric transformer to be used in an autonomous sensor unit, possibly in conjunction with a RF-MEMS retro-modulator.

This study presents the design, fabrication, and test of a micro accelerometer with intrinsic processing capabilities, that integrates the functions of sensing and computing in the same MEMS. The device consists of an inertial mass…

The recent explosion in low-cost, low-power wireless microcontrollers, coupled with low-power, robust MEMS sensors has opened up the opportunity to create new forms of low-cost Industrial Internet-of-Things (IIoT) devices for condition…

Microelectromechanical systems (MEMS) speakers are compact, scalable alternatives to traditional voice coil speakers, promising improved sound quality through precise semiconductor manufacturing. This review provides an overview of the…

Scaling down of electronic systems has generated a large interest in the research on miniature energy sources. In this paper a closer look is given to the use of vibration based scavengers in industrial environments, where waste energy is…

A variety of scientific fields like proteomics and spintronics have created a new demand for on-chip devices capable of sensing parameters localized within a few tens of micrometers. Nano and microelectromechanical systems (NEMS/MEMS) are…

Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…