其他计算机科学
In this research, we present a simple and cost effective soft lithographic process to fabricate PLA scaffolds for tissue engineering. In which, the negative photoresist JSR THB-120N was spun on a glass subtract followed by conventional UV…
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink…
This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in which the Pt micro heater and electrodes are deposited directly…
In this work, a 3-D simulation is performed to study for the solid-fluid coupling effect driven by piezoelectric materials and utilizes asymmetric obstacles to control the flow direction. The result of simulation is also verified. For a…
In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum…
Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction between analytes and ligands: the mass transport process and…
This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main problems related to silicon microneedles : broking of the top…
This paper presents a polycrystalline silicon germanium (poly-SiGe) thermopile specially designed for thermoelectric generators used on human body. Both the design of the single thermocouple and the arrangement of the thermocouple array…
A new type of integrated temperature and humidity sensor applying LTCC-technology has been developed and characterized. In this approach, sensing elements are implemented using heated metal resistors (Pt-elements), where one is exposed to…
For modern Gas sensors, high sensitivity and low power are expected. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors…
We present a thermal activated solvent bonding technique for the formation of embedded microstrucutres in polymer. It is based on the temperature dependent solubility of polymer in a liquid that is not a solvent at room temperature. With…
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration [1]. Measurements…
An original packaging method suitable for integrated thermal mass flow sensors is presented. The method consists in the application of a plastic transparent adapter to the chip surface. The adapter is sealed to the chip surface by means of…
Micro end-milling method is a universal micro manufacturing method, which can be used to fabricating complex 3D structures and parts with many materials. But compared with their micrometer order size, their surface roughness quality is not…
Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable…
With the development of nanotechnology, the measurement of electrical properties in local area of materials and devices has become a great need. Although a lot kind of scanning probe microscope have been developed for satisfying the…
In this work, we present a fully parameterized capped transmission line model for electromagnetic optimization of a wafer level package (WLP) for RF MEMS applications using the Ansoft HFSS-TM electromagnetic simulator. All the degrees of…
This paper presents a novel method to fabricate the horizontal frustum structure as a planar optical waveguide by using the proximity printing technique. A horizontal frustum optical waveguide with a both lateral and vertical taper…
Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined. The approach consists on one hand in performing static…
The suspended electrothermal polysilicon micro beams generate displacements and forces by thermal buckling effects. In the previous electro-thermal and thermo-elastic models of suspended polysilicon micro beams, the thermo-mechanical…