Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device
Other Computer Science
2008-02-22 v1
Abstract
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
Cite
@article{arxiv.0802.3073,
title = {Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device},
author = {L. Grasser and H. Mathias and F. Parrain and X. Le Roux and J. -P. Gilles},
journal= {arXiv preprint arXiv:0802.3073},
year = {2008}
}
Comments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/EDA-Publishing)